Patterning via Optical Saturable Transitions - Fabrication and Characterization

UV-assisted nanoimprint lithography: the impact of the loading effect in silicon on nanoscale patterns of metalens

“…This cost is inuenced by various factors, including yield and writing speed, and presents a signicant limitation. [29][30][31] Despite this, silicon molds offer advantages of long lifetime, attributable to silicon's superior mechanical properties. On the other hand, quartz molds, while also utilized in nanoimprint lithography, may exhibit fragility and reduced durability compared to silicon molds.…”