Patterning via self-organization and self-folding: Beyond conventional lithography

Kang, Sung Hoon; Dickey, Michael D.

doi:10.1557/mrs.2016.3

Cited by 13 publications

(6 citation statements)

References 32 publications

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“…Different fabrication techniques have been developed to form various 3D structures, including 3D printing, two photon/multiphoton lithography, and self‐assembly . However, these methods cannot produce inorganic semiconductors such as silicon . Alternatively, mechanically driven assemblies such as strain‐induced bending or folding and compressive buckling have the potential to extend the range of materials, including silicon .…”

Section: Comparison Between Kirigami Structures In Terms Of Response mentioning

confidence: 99%

Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

Humood

Shi

Han

et al. 2018

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Mechanically guided 3D microassembly with controlled compressive buckling represents a promising emerging route to 3D mesostructures in a broad range of advanced materials, including single-crystalline silicon (Si), of direct relevance to microelectronic devices. During practical applications, the assembled 3D mesostructures and microdevices usually undergo external mechanical loading such as out-of-plane compression, which can induce damage in or failure of the structures/devices. Here, the mechanical responses of a few mechanically assembled 3D kirigami mesostructures under flat-punch compression are studied through combined experiment and finite element analyses. These 3D kirigami mesostructures consisting of a bilayer of Si and SU-8 epoxy are formed through integration of patterned 2D precursors with a prestretched elastomeric substrate at predefined bonding sites to allow controlled buckling that transforms them into desired 3D configurations. In situ scanning electron microscopy measurement enables detailed studies of the mechanical behavior of these structures. Analysis of the load-displacement curves allows the measurement of the effective stiffness and elastic recovery of various 3D structures. The compression experiments indicate distinct regimes in the compressive force/displacement curves and reveals different geometry-dependent deformation for the structures. Complementary computational modeling supports the experimental findings and further explains the geometry-dependent deformation.

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Section: Comparison Between Kirigami Structures In Terms Of Response mentioning

confidence: 99%

Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

Humood

Shi

Han

et al. 2018

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“…2a ). The first two steps are fully compatible with conventional photolithographic processes, where established microfabrication tools such as photopatterning, physical and chemical vapor depositions, wet and dry etching can be employed 42 , 43 . Due to the parallel nature of the microfabrication techniques and the self-folding process, large-area arrays with many identical pixels can be obtained in the same fabrication batch.…”

Section: Resultsmentioning

confidence: 99%

A new dimension for magnetosensitive e-skins: active matrix integrated micro-origami sensor arrays

et al. 2022

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Magnetic sensors are widely used in our daily life for assessing the position and orientation of objects. Recently, the magnetic sensing modality has been introduced to electronic skins (e-skins), enabling remote perception of moving objects. However, the integration density of magnetic sensors is limited and the vector properties of the magnetic field cannot be fully explored since the sensors can only perceive field components in one or two dimensions. Here, we report an approach to fabricate high-density integrated active matrix magnetic sensor with three-dimensional (3D) magnetic vector field sensing capability. The 3D magnetic sensor is composed of an array of self-assembled micro-origami cubic architectures with biased anisotropic magnetoresistance (AMR) sensors manufactured in a wafer-scale process. Integrating the 3D magnetic sensors into an e-skin with embedded magnetic hairs enables real-time multidirectional tactile perception. We demonstrate a versatile approach for the fabrication of active matrix integrated 3D sensor arrays using micro-origami and pave the way for new electronic devices relying on the autonomous rearrangement of functional elements in space.

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“…Although nanostructures can be designed by top-down approaches (e.g., [2][3][4]), its high cost and size limitations (∼100 nm) have made the low-cost bottom-up approaches involving selforganization processes attractive. This approach is still investigated, as confirmed by the numerous recent papers and the recent issue of MRS Bulletin dedicated to the fabrication of ordered patterns and nanostructures via self-organization [5]. However, the realization of oxide nanostructures is still much less advanced than metal and semiconductor nanostructures, certainly because of the structural and chemical complexity of functional oxides.…”

Section: Introductionmentioning

confidence: 99%

Oxide Single-Crystal Surfaces: A Playground for Self-assembled Oxide Nanostructures

Bachelet

2016

Front. Phys.

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The different (structural and chemical) properties of oxide single-crystal surfaces that can be exploited for the growth of self-assembled oxide nanostructures are briefly reviewed. A large variety of nanostructures can be obtained, controlled by surface and interface structure and chemistry, which play a predominant role in their formation mechanisms at this nanometer scale. It is reminded that surface atomic order, surface steps, chemical terminations or heteroepitaxial strain can be used to generate various nanostructures such as nanodots, nanowires, nanostripes, with controlled size, morphology, and spatial ordering.

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Patterning via self-organization and self-folding: Beyond conventional lithography

Abstract: Abstract

Cited by 13 publications

References 32 publications

Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

Fabrication and Deformation of 3D Multilayered Kirigami Microstructures

A new dimension for magnetosensitive e-skins: active matrix integrated micro-origami sensor arrays

Oxide Single-Crystal Surfaces: A Playground for Self-assembled Oxide Nanostructures

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