PBS process optimization for bow-wake phenomena

Abstract

We have perfornxil a design experiments to optimize our PBS Process related to bow_wake problem with critical Poly,Metal layers. In pattern dependent geometry as like dogjone pattern or along feature edge of large clear window (swelling), it happened bow_wake(call:dog bone) phenomena of feature distorted in PBS resist processing. We have investigated the effects of independent factors as like resist thickness, high dose, developer concentration, process factors(bias, exhaust, humidity, flow), post overlapping step optimization, media dispense method through binary or uniary(flat fan spray) nozzle (Developer system A, B, C,). Finally, We have concluded that the bow_wake problems were related to the developer media dispense way by chemical dispense method (uniary, binary), media supply differences(pump, air pressured) and process optimization.