Pd/Ag membranes on porous alumina substrates by unbalanced magnetron sputtering

O’Brien, James J.; Hughes, R.; Hisek, J

doi:10.1016/s0257-8972(01)01198-7

Cited by 36 publications

(21 citation statements)

References 19 publications

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“…7 the measured fluxes are plotted against the difference in hydrogen partial pressure in retentate and permeate, which gives a value of n close to 1 for 500 nm thin Pd-Ag membrane. This -value indicates that surface processes dominate the separation process, which is consistent with common observations for submicron thick Pd-based membranes [7]- [9], [13]- [18]. The fact that in our experiments hydrogen transport though the Pd-Ag film is governed by surface reactions may be caused by several reasons:…”

Section: -42 Mol H =M 1 Ssupporting

confidence: 91%

“…It is expected that as the membrane thickness decreases to the submicron range, diffusion of hydrogen atoms becomes extremely fast. In that case, the -value will be close to 1 [7]- [9], [13]- [18].…”

Section: -42 Mol H =M 1 Smentioning

confidence: 90%

“…This method has turned out to be feasible, however to make submicron thick, defect-free separation membranes is difficult, due to the fact that commercially available porous supports are likely to be supplied with imperfections like particulates on the substrate, nonuniformities in pore size, etc. Due to this, the metal films do not cover up the supports completely [13], [14], [18], [19], [21]. For instance, Roa et al deposited a 10 thick Pd-Cu film on a porous -alumina (nominal pore size of 5-50 nm) and reported that their membrane was not defect-free due to the imperfections of the initial supports [19].…”

mentioning

confidence: 99%

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Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

Tong

Gielens

Gardeniers

et al. 2005

J. Microelectromech. Syst.

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Abstract-A submicron thick and defect-free palladium-silver (Pd-Ag) alloy membrane is fabricated on a supporting microsieve by using microfabrication techniques. The microfabrication process also creates a robust wafer-scale membrane module, which can easily be inserted into a membrane holder to have gas-tight connections to the outer world. The microfabricated membrane demonstrated high separation fluxes of up to 4 mol H 2 m 2 s with a minimal selectivity of 1500 for hydrogen over helium (H 2 He) at 450 C and 83 kPa H 2 retentate pressure. The present membrane has great potential for hydrogen purification and in applications like dehydrogenation chemistry. In addition, the presented technology can be used to fabricate other kinds of ultrathin but strong and defect-free membranes to set up new applications.[1235]

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Section: -42 Mol H =M 1 Ssupporting

confidence: 91%

Section: -42 Mol H =M 1 Smentioning

confidence: 90%

mentioning

confidence: 99%

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Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

Tong

Gielens

Gardeniers

et al. 2005

J. Microelectromech. Syst.

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“…The flux and selectivity were determined by measuring the hydrogen and helium concentration in the nitrogen stream with a gas chromatograph, equipped with a thermal conductivity detector (TCD). Details of the measurement set-up have been reported by Gielens et al [31].…”

Section: Hydrogen Permeation and Selectivity Of The Membranesmentioning

confidence: 99%

Microfabrication of palladium-silver alloy membranes for hydrogen separation

Tong

Berenschot

Boer

et al. 2003

J. Microelectromech. Syst.

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“…This is due to the high critical temperature of hydrogen at which alpha and beta phase transition can coexist during hydrogen absorption that often causes destruction of the membrane structure [2,9]. Moreover, pure palladium membranes are known to be very expensive [6,10] and easily poisoned by carbon monoxide [11]. To overcome these problems, alloys of Pd with group IB metals such as silver and copper are normally adopted [12].…”

Section: Introductionmentioning

confidence: 99%

Microfabricated Hydrogen Sensitive Membranes

et al. 2008

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Thin, defect-free palladium, palladium/copper and palladium/silver hydrogen absorbing membranes were microfabricated. A dual sputtering technique was used to deposit the palladium alloy membranes of only 1 lm thickness on a nonporous silicon substrate. Advanced silicon etching (ASE) was applied on the backside to create a mechanically stable support structure for the thin films. Performance evaluation was carried out for different gases in a temperature range of 20°C to 298°C at a constant differential pressure of 110 kPa at the two sides of the membrane. The composite membranes show an excellent permeation rate of hydrogen, which appears to be 0.05 Pa m 3 s -1 and 0.01 · 10 -3 Pa m 3 s -1 at 20°C for the microfabricated 23 % silver and the 53 % copper composite membranes, respectively. The selectivity to hydrogen over a gas mixture containing, in addition to hydrogen, carbon monoxide, carbon dioxide and nitrogen was measured. The mass spectrometer did not detect any CO 2 or CO, showing that the membrane is completely hydrogen selective. The microfabricated membranes exhibit both high mechanical strength (they easily withstand pressures up to 4 bar) and high thermal stability (up to 650°C).

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Pd/Ag membranes on porous alumina substrates by unbalanced magnetron sputtering

Cited by 36 publications

References 19 publications

Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

Microsieve supporting palladium-silver alloy membrane and application to hydrogen separation

Microfabrication of palladium-silver alloy membranes for hydrogen separation

Microfabricated Hydrogen Sensitive Membranes

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