2010
DOI: 10.1088/0960-1317/20/8/087002
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PDMS biochips with integrated waveguides

Abstract: A general method is described for the fabrication of polydimethylsiloxane (PDMS) lab-on-a-chip (LOC) devices with integrated optic and fluidic elements. The PDMS core layer containing the optic and fluidic components is cast and cured under pressure on a silicon master. Subsequently, outer layers of lower-index PDMS are bonded to the core layer to provide optical and fluidic confinement. The functionality of the waveguides and microchannels is demonstrated by the detection and identification of two different t… Show more

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Cited by 20 publications
(15 citation statements)
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“…Related studies have revealed that the femtosecond laser is a powerful 3D processing tool with the following advantages: high spatial resolution, high accuracy, and high compatibility with other processing techniques. After the pattern shape is determined on the substrate, glass and polydimethylsiloxane (PDMS) are widely used as the main material because they are transparent and have been widely applied in the biochip or microfluidic systems in recent years [ 8 ]. The advantages of glass-based and PDMS based chips are their high transparency, favorable biocompatibility, and chemical stability.…”
Section: Introductionmentioning
confidence: 99%
“…Related studies have revealed that the femtosecond laser is a powerful 3D processing tool with the following advantages: high spatial resolution, high accuracy, and high compatibility with other processing techniques. After the pattern shape is determined on the substrate, glass and polydimethylsiloxane (PDMS) are widely used as the main material because they are transparent and have been widely applied in the biochip or microfluidic systems in recent years [ 8 ]. The advantages of glass-based and PDMS based chips are their high transparency, favorable biocompatibility, and chemical stability.…”
Section: Introductionmentioning
confidence: 99%
“…Development of simple and established fluorescence labeling techniques, along with microfluidic systems which enable delivery of extremely low volume samples, have made these sensors even more attractive 26 . Successful development of several silicon and PDMS based optical waveguides 2730 with integrated microfluidic channels has led to the emergence of a new set of optofluidic sensor devices where femtoliter excitation volumes have brought the detection limits down to single nucleic acids 31 . However, these systems lack any sample preparation capabilities and require fully preprocessed samples for analysis.…”
Section: Introductionmentioning
confidence: 99%
“…A mold is produced by soft lithography [ 12 , 13 ] or laser fabrication [ 14 – 16 ] in a photoresist layer (SU-8) or a metallic sheet. Hot embossing technique [ 14 , 16 , 17 ] or poured molding method [ 15 , 18 20 ] is used to duplicate the mold in a polymer sheet. The peeled polymer replica is sealed to a flat surface to enclose the channels.…”
Section: Techniques For Microfabrication Of Opto-microfluidic Sensorsmentioning
confidence: 99%
“…The peeled polymer replica is sealed to a flat surface to enclose the channels. Much complex structures in a microfluidic device can be developed by stacking multiple polymer layers (100 μm in thickness per layer), similar to a sandwich structure [ 18 , 21 ]. The time period is less than two days starting from design to the realization of a functional device.…”
Section: Techniques For Microfabrication Of Opto-microfluidic Sensorsmentioning
confidence: 99%