Abstract:A series of thin-film composite materials based on Co and SiO were deposited via electron-beam coevaporation technique using two independent sources. The concentration of Co atoms of thin-film composite materials varied from 35 to 90 at. %. It was controlled by using a scanning electron microscope (Tescan VE-GA3) with an energy-scattering X-ray (EDX) detector (Oxford Instruments). The total thickness of the nanocomposites was controlled by a system of two independent quartz resonators and amounted to 30 and 60… Show more
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