2018
DOI: 10.1080/10426914.2018.1512114
|View full text |Cite
|
Sign up to set email alerts
|

PECVD process parameter optimization: towards increased hardness of diamond-like carbon thin films

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
2
2
1

Citation Types

0
21
0
1

Year Published

2019
2019
2024
2024

Publication Types

Select...
6
3

Relationship

2
7

Authors

Journals

citations
Cited by 46 publications
(22 citation statements)
references
References 25 publications
0
21
0
1
Order By: Relevance
“…Since residuals are the errors in the fitting, sometimes SSR is also referred to as the sum of squared error in predictions (SSE). ANOVA is then performed to identify and eliminate the non-significant terms of the fitted RSM model [30][31].…”
Section: Response Surface Methodologymentioning
confidence: 99%
“…Since residuals are the errors in the fitting, sometimes SSR is also referred to as the sum of squared error in predictions (SSE). ANOVA is then performed to identify and eliminate the non-significant terms of the fitted RSM model [30][31].…”
Section: Response Surface Methodologymentioning
confidence: 99%
“…The model F-value with 3.7404 implies the model is substantial. "Prob > F" higher than 0.05 represents that the model is not significant [27,28]. In such a situation, N, fd, N 2 and f 2 are the most important model terms.…”
Section: Anova Of the Regression Modelmentioning
confidence: 97%
“…In Figure 3, the residuals, internally studentized residuals, and externally studentized residuals are plotted against the predicted response values. It is observed that all the data points show a random scatter, which could mean that the hypothesis that constant variance is maintained is not violated [27]. In Figure 3, the residuals, internally studentized residuals, and externally studentized residuals are plotted against the predicted response values.…”
Section: Analyzing the Regression Modelmentioning
confidence: 99%
“…Diamond is the hardest available material till date. It is very much popular due to its mechanical, thermal and chemical properties [1]. Rapid developmental works were carried out in the last three decades in the research area of CVD diamond coating.…”
Section: Introductionmentioning
confidence: 99%