As the production demand for laser drilled holes continues to grow, efficient and reliable process monitoring and control techniques are required in order to improve the manufacturing efficiency and reduce manufacturing cost for ensuring quality conformance. A robust, real-time monitoring system for breakthrough and the drilling depth detection in laser drilling is proposed. The system is based on based on coaxial visual sensing technology of the working surface using a CMOS camera, coupled with microcontroller control of the drilling laser operation. The camera is installed adjacent to the entry surface of the workpiece, and the spatial extend of the laser-induced plasma at the working site is monitored as the criterion for breakthrough detection. Therefore, on-line inspection system with low cost is developed to increase productivity. Experimental results show that the proposed system successfully detects when the laser beam has broken through a workpiece, and turns off the laser automatically by feedback control.