Optical Fiber Communication Conference/National Fiber Optic Engineers Conference 2011 2011
DOI: 10.1364/ofc.2011.pdpc3
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Perfect set-and-forget alignment of silicon photonic resonators and interferometers

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Cited by 47 publications
(45 citation statements)
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“…The latter method has a possible advantage in that we can characterize and then tune the static imperfections of the effective X, Z measurements very well. This "set-and-forget" possibility has already been demonstrated to work with incredible accuracy [9,44]. Also, since Xmeasurements are more sensitive, perhaps we make them the default and switch only to a Z-measurement?…”
Section: Switches/phase Shiftersmentioning
confidence: 99%
“…The latter method has a possible advantage in that we can characterize and then tune the static imperfections of the effective X, Z measurements very well. This "set-and-forget" possibility has already been demonstrated to work with incredible accuracy [9,44]. Also, since Xmeasurements are more sensitive, perhaps we make them the default and switch only to a Z-measurement?…”
Section: Switches/phase Shiftersmentioning
confidence: 99%
“…One potential method is based on photo-chemistry as shown in polymer microrings [40]. For silicon microrings, our method is based on field-induced local oxidation of Si to SiO2 via a chemical reaction near an electrically-biased conducting atomic-force microscope tip [41], [42]. For convenience, we used an atomic force microscope available in our lab, but no part of our method depends on "atomic forces".…”
Section: Subsequent Extensionsmentioning
confidence: 99%
“…For example, a 1 nm variation in waveguide width of an SOI-based ring can cause a 2 nm shift in the operating wavelength [26], while the temperature sensitivity of the resonant wavelength peak typically varies between 60 pm/K and 100 pm/K [27]. Therefore, both active device tuning, and various post-fabrication trimming techniques have been used to precisely control the resonant wavelength [28][29][30][31][32][33].…”
Section: Published Bymentioning
confidence: 99%