2018
DOI: 10.3390/nano8080609
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Perfluoropolyether (PFPE) Intermediate Molds for High-Resolution Thermal Nanoimprint Lithography

Abstract: Among soft lithography techniques, Thermal Nanoimprint Lithography (NIL) is a high-throughput and low-cost process that can be applied to a broad range of thermoplastic materials. By simply applying the appropriate pressure and temperature combination, it is possible to transfer a pattern from a mold surface to the chosen material. Usually, high-resolution and large-area NIL molds are difficult to fabricate and expensive. Furthermore, they are typically made of silicon or other hard materials such as nickel or… Show more

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Cited by 13 publications
(6 citation statements)
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“…The topography with GRs (lines of micron ridges and grooves) was fabricated by means of electron-beam lithography (EBL) and reactive ion etching (RIE) starting from a commercial p-doped silicon wafer (SYLTRONIX, France), as previously reported [45, 46]. Perfluoropolyether (PFPE) resin (FLUOROLINK® MD 700, Solvay Specialty Polymers, Bollate, Italy) was mixed with 3% w/w photoinitiator Darocur 1173 (C10H12O2, 405655 Sigma Aldrich), poured on top of the GR initial silicon mold, and crosslinked by UV-light (365 nm, 25 mW cm −2 ) as reported in [47]. Cyclic olefin copolymer (COC) foils (thickness of 140 μm, Microfluidic ChipShop GmbH, Jena, Germany) were imprinted using an Obducat Nanoimprint 24 system (Obducat, Lund, Sweden) using the PFPE molds.…”
Section: Methodsmentioning
confidence: 99%
“…The topography with GRs (lines of micron ridges and grooves) was fabricated by means of electron-beam lithography (EBL) and reactive ion etching (RIE) starting from a commercial p-doped silicon wafer (SYLTRONIX, France), as previously reported [45, 46]. Perfluoropolyether (PFPE) resin (FLUOROLINK® MD 700, Solvay Specialty Polymers, Bollate, Italy) was mixed with 3% w/w photoinitiator Darocur 1173 (C10H12O2, 405655 Sigma Aldrich), poured on top of the GR initial silicon mold, and crosslinked by UV-light (365 nm, 25 mW cm −2 ) as reported in [47]. Cyclic olefin copolymer (COC) foils (thickness of 140 μm, Microfluidic ChipShop GmbH, Jena, Germany) were imprinted using an Obducat Nanoimprint 24 system (Obducat, Lund, Sweden) using the PFPE molds.…”
Section: Methodsmentioning
confidence: 99%
“…Given our previous results 40 , the T1 geometry is here considered as the gold standard guidance topography for our neuronal cell model. NG patterns were replicated from initial molds into biocompatible and transparent Cyclic Olefin Copolymer (COC) thermoplastic polymer foils by exploiting perfluoropolyether (PFPE) intermediate molds, as described in Materials and Methods and in 54 . Briefly, PFPE intermediate molds were obtained by pouring a PFPE dispersion on top of each initial mold, and then crosslinking with UV light (Fig.…”
Section: Resultsmentioning
confidence: 99%
“…PDMS compliance has been recognized to affect the imprint quality. 26 Despite this limitation, the three volume distributions obtained with three different imprints greatly overlap with each other. We also note that the volume standard deviation is much lower than the 10% limit necessary for proper quantification.…”
Section: Discussionmentioning
confidence: 99%