1998
DOI: 10.1002/(sici)1097-0231(19980930)12:18<1246::aid-rcm316>3.0.co;2-c
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Performance characteristics of a chemical imaging time-of-flight mass spectrometer

Abstract: A chemical imaging time-of-flight secondary ion mass spectrometer is described. It consists of a liquid metal ion gun, medium energy resolution reflectron mass analyzer, liquid nitrogen cooled sample stage, preparation chamber and dual stage entry port. Unique features include compatibility with laser postionization experiments, large field of view, cryogenic sample handling capability and high incident ion beam current. Instrument performance is illustrated by the characterization of scanning electron microsc… Show more

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Cited by 174 publications
(150 citation statements)
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“…A time-of-flight secondary ion mass spectrometer (TOFSIMS) instrument based on the BIOTOF design (Braun et al 1998) was used to acquire high spatial resolution and high mass resolution analyses and is described in detail elsewhere (Henkel et al 2006, Forthcoming). A 25keV Ga+ primary ion beam was rastered over the sample to sputter secondary ions, which were then mass analyzed by time-offlight mass spectrometry.…”
Section: Methodsmentioning
confidence: 99%
“…A time-of-flight secondary ion mass spectrometer (TOFSIMS) instrument based on the BIOTOF design (Braun et al 1998) was used to acquire high spatial resolution and high mass resolution analyses and is described in detail elsewhere (Henkel et al 2006, Forthcoming). A 25keV Ga+ primary ion beam was rastered over the sample to sputter secondary ions, which were then mass analyzed by time-offlight mass spectrometry.…”
Section: Methodsmentioning
confidence: 99%
“…Experiments were performed using a TOF-SIMS instrument, which has been described in detail previously [28]. The instrument is equipped with two ion sources to generate the primary ion beams employed here.…”
Section: Methodsmentioning
confidence: 99%
“…Depth profiles and TOF-SIMS spectra were recorded using previously described instrumentation [8,25]. Spectra were recorded using 50 ns pulses for bombardment, followed by delayed extraction of secondary ions with a delay of 100 ns.…”
Section: Instrumentation and Depth-profiling Experimentsmentioning
confidence: 99%