Performance characteristics of an excimer laser (XeCl) with single-stage magnetic pulse compression

Varshnay, N; Singh, Ashish; Benerji, N.S.

doi:10.1007/s12043-016-1334-3

Cited by 1 publication

(1 citation statement)

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“…Gas discharge pumping has revolutionized the development of excimer lasers, enabling pulse repetition rates of several kHz and pulse voltage rise times of less than 100 ns. These improvements are attributed to the recent use of allsolid-state power supplies with magnetic pulse compression (MPC) [12][13][14][15]. * Author to whom any correspondence should be addressed.…”

Section: Introductionmentioning

confidence: 99%

Effects of tunable circuit parameters on pulsed discharge and input-output characteristics of a XeCl excimer laser

Chen,

Zhao,

Liu

et al. 2024

J. Phys. D: Appl. Phys.

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High-pressure, pulsed discharge-pumped XeCl excimer lasers are operating in the ultraviolet range at a wavelength of 308 nm. In this paper, a one-dimensional fluid model coupled to a magnetic pulse compression (MPC) excitation circuit and a laser gain model is established for describing the discharge and laser output characteristics of XeCl excimer lasers. The effects of the peaking capacitor C p (the terminal of the MPC circuit) on the discharge properties and input-output characteristics are explored. The results reveal that C p plays a key role in suppressing discharge pulse oscillation, which in turn influences the peak value and duration of the laser pulse. By optimizing the capacitance, a maximum excimer formation efficiency of 6.6% and a maximum laser output efficiency of 5% (output energy of 1.26 J) are obtained when C p = 1.12 C s , where C s is the storage capacitor in the MPC circuit.

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Section: Introductionmentioning

confidence: 99%