2012
DOI: 10.1016/j.measurement.2011.11.012
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Performance evaluation experiments on a laser spot triangulation probe

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Cited by 47 publications
(17 citation statements)
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“…The mean and standard deviation of these point-to-point differences are 1.5 µm and 10 µm, respectively. Most of the large differences happen at the side walls where the non-contact probe measures the surface at a grazing angle and therefore produces larger measurement errors [11]. The small value for the mean difference suggests that there is no bias (or vertical shift) between the two profiles.…”
Section: Comparison and Parameter Evaluationmentioning
confidence: 99%
“…The mean and standard deviation of these point-to-point differences are 1.5 µm and 10 µm, respectively. Most of the large differences happen at the side walls where the non-contact probe measures the surface at a grazing angle and therefore produces larger measurement errors [11]. The small value for the mean difference suggests that there is no bias (or vertical shift) between the two profiles.…”
Section: Comparison and Parameter Evaluationmentioning
confidence: 99%
“…Over the last years, several studies have shown the importance of the analysis of measurement uncertainties [3,7,11,15,20,21,22,23,24]. Thus, Xi et al [24] indicated that various scanner-to-surface distances and inclination angles raise systematic uncertainties for the used sensor.…”
Section: Introductionmentioning
confidence: 99%
“…While the previous approaches were primarily focused on the imaging geometry or fast and easy performance tests, Muralikrishnan et al [15] exposed and analyzed socalled "hidden performance attributes" (Businaki et al [3]) of a laser triangulation spot probe. For example, they demonstrated the in uence of di erent surface materials on linearity and highlighted the impact on height measurements of two di erent ceramic gauges.…”
Section: Introductionmentioning
confidence: 99%
“…The latter approach reduces the effect of nonuniformly distributed light and surface damage, but does not affect speckle related uncertainty. Even simple linear dimensional measurement accuracy of well-defined objects is affected by a number of error sources [11,12]. Undesired secondary reflections from vertical surfaces are proven to present the dominant measurement error source.…”
Section: Introductionmentioning
confidence: 99%