Performance Improvement of In-Ga-Zn Oxide Thin-Film Transistors by Excimer Laser Annealing
Xiaohui Zhang,
Yaping Li,
Yanwei Li
et al.
Abstract:We applied excimer laser annealing (ELA) on indium-zinc oxide (IZO) and IZO/indium-gallium-zinc oxide (IGZO) heterojunction thin-film transistors (TFTs) to improve their electrical characteristics. The IZO and IZO/IGZO heterojunction thin films were prepared by the physical vapor deposition method without any other annealing process. The crystalline state and composition of the as-deposited film and the excimer-laser-annealed films were analyzed by X-ray diffraction and X-ray photoelectron spectroscopy. In ord… Show more
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