Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

Chien, Ya-Ting; Tu, Hong-Yi; Chen, Wen-Chung; Zheng, Yu‐Zhe; Chou, Sheng‐Yao; Sun, Pei-Jun; Tsai, Xin-Ying; Chang, Liuwen; Chou, M. C.; Tsai, Tsung‐Ming

doi:10.1016/j.mssp.2023.107343

Materials Science in Semiconductor Processing

2023

DOI: 10.1016/j.mssp.2023.107343

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Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

Ya-Ting Chien

Hong-Yi Tu

Wen-Chung Chen

et al.

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Performance improvement of Zn0.5Mg0.5O UV sensor by supercritical fluid technology

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References 38 publications

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