Performance increase in turbomolecular pumps with curved type blades

Şengil, Nevşan

doi:10.1016/j.vacuum.2011.12.018

Cited by 14 publications

(5 citation statements)

References 13 publications

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“…An increase in the turbine rotor speed should significantly improve the pumping performance of the TMP, but the current growth trend is not obvious. From a structural perspective, the blade row structure of the turbine rotor still uses the traditional straight blade row (TSBR) with equal widths and thicknesses of the top teeth 7 , which cannot match its high rotational speed. From a theoretical model perspective, traditional modelling methods are mainly based on past single-stage or two-stage blade row models 8 , which cannot accurately reflect the transport process of gas molecules in multistage blade rows.…”

Section: B4mentioning

confidence: 99%

Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Sun,

Deng,

Wang

et al. 2024

Sci Rep

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In the present study, a new turbomolecular pump (TMP) performance prediction algorithm is proposed according to the variable surface combined blade row (VSCBR) geometric model. The simulation calculation program is designed to perform structural optimization and flow field analysis. Research on the pumping performance of the traditional straight blade row (TSBR) indicates that when the blade velocity ratio is greater than 1, the increase in the pumping speed and compression ratio of the TMP gradually tends to stabilize. Response surface methodology is used to optimize the structural parameters of the first four stages of the combined blade row. The optimized VSCBR increases the pumping speed by 18.2% compared to that of the TSBR. The flow field analysis based on the optimized VSCBR shows that gas molecules reaching the rear blades are likely to approach the outlet, and the proportion of gas molecules in this region exceeds 50%. Therefore, the blades we designed should be conducive to additional gas molecules reaching the outlet.

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Section: B4mentioning

confidence: 99%

Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Sun,

Deng,

Wang

et al. 2024

Sci Rep

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“…In terms of non-parallel blade rows, Bird [23] studied the pumping performance of the triangular cross-section blades using the direct simulation Monte Carlo method, and the results showed that in the free molecular flow stage, the front blades would effectively increase the maximum compression ratio if they had sharp leading edges. Sengil [24] compared the pumping performance of several curved blades and parallel blades in different flow fields using the direct simulation Monte Carlo method, and the results showed that the performance of the combination of the rotor that used the parallel blade and the stator that used the curved blade was expected to be better than the combination of the rotor and stator that both used the parallel blade.…”

Section: Introductionmentioning

confidence: 99%

Modeling and Optimization of the Blade Structural Parameters for a Turbomolecular Pump

Chen

Wang

et al. 2023

Machines

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The development of high-performance mass spectrometer and vacuum coating technology has placed higher demand on the vacuum level of turbomolecular pumps (TMPs), which are required to possess a greater compression ratio and faster pumping speed. There exists a relation of “as one falls, another rises” between the compression ratio and the pumping speed when traditional improvement methods are used. How to simultaneously increase the compression ratio and pumping speed is a very important question for the high-end turbomolecular pumps. In this study, on the basis of a parallel blade and thin gas aerodynamic model, several types of curved blade are presented to improve the pumping performance of TMPs. The comparison results show that the positive quadratic surface exhibited a better pumping performance than the other curved blades. After that, a hybrid optimization method based on a support vector machine (SVR) and particle swarm optimization (PSO) are proposed to obtain the structural parameters of the rotor blade for the highest pumping speed and maximum compression ratio. The optimization results show that, compared with the parallel blades, the compression single-stage blade row with quadratic surface structure was able to increase the maximum compression ratio by 10.35% and the maximum pumping speed factor by 4.61%. In addition, the intermediate single-stage blade row with quadratic surface structure increased the maximum compression ratio by 9.15% and the maximum pumping speed factor by 2.53%.

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“…Therefore, in the past decade, a wide variety of technical topics on TMP systems were studied such as pumping speed (Giors et al, 2010; Kobayashi et al, 2009; Sengil, 2012; Sengil and Edis, 2011; Shams et al, 2010), influence by external magnetic field (Biswas et al, 2011; Größle et al, 2012; Ogiwara et al, 2009, 2013; Wolf et al, 2011), vibration suppression on TMP blade rotor (Herzog et al, 1996; Liu et al, 2002; Okubo et al, 2013; Nakamura et al, 2014) and so on. As to the vibration suppression on TMP blade rotor equipped with active magnetic bearings (AMBs), a few well-known methods such as automatic balancing system (ABS), peak-of-gain control (PGC) and other approaches were often discussed (Herzog et al, 1996; Liu et al, 2002; Okubo et al, 2013; Nakamura et al, 2014).…”

Section: Introductionmentioning

confidence: 99%

Rotor speed control strategy to avoid resonance frequencies of turbo-molecular pump

Chiu

Tsai

2018

Transactions of the Institute of Measurement and Control

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A novel design of composite turbo-molecular pump (CTMP) is proposed. The major configuration of CTMP is composed by a coarse pump, a turbo-molecular pump (TMP) and a magnetic gear unit (MGU) capable of speed amplification. The modal analysis and the study on rotor/bearing dynamics are undertaken at first to estimate the resonance frequencies of the TMP blade rotor itself solely and the interactive dynamics of blade rotor/radial active magnetic bearing (BR/RAMB) subsystem. Secondly, an economical and efficient method by adjusting the angular acceleration speed of BR, namely RDPS, is proposed to ensure the natural frequencies of BR/RAMB sub-system are not driven by the rotor speed all the time. Besides, a speed route of rotor during the take-off cycle of TMP is proposed to satisfy the requirements of system stiffness and prevention of system resonance being driven. Finally, a position conversion method is introduced to solve the problem of distinct locations of gap sensors and the actual gap between rotor and the auxiliary bearings such that the measurement feedback to the controller, RDPS, becomes applicable to formulate the correct actions for providing enough gap margin to prevent collision of rotor against bearings. To sum up, the CTMP possesses the merit of reduction of electrical energy consumption by 17%, compared with the conventional TMP unit. By intensive computer simulations, the RDPS indeed manifests its outstanding performance to efficiently skip or bypass the natural frequencies of the closed-loop system within a very short time period and guarantee the system stability.

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Performance increase in turbomolecular pumps with curved type blades

Cited by 14 publications

References 13 publications

Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Structural optimization and flow field analysis of turbomolecular pump based on a new performance prediction algorithm

Modeling and Optimization of the Blade Structural Parameters for a Turbomolecular Pump

Rotor speed control strategy to avoid resonance frequencies of turbo-molecular pump

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