Silicon carbide (SiC) is a wide band gap semiconductor and an attractive candidate for
applications in harsh environments such as space, fusion, or future high luminosity colliders. Due
to the large band gap, the leakage currents in SiC devices are extremely small, even after
irradiation to very high fluences, enabling operation without cooling and at high
temperatures. This study investigates the effect of neutron irradiation on 50 μm p-n 4H-SiC
diodes using current-voltage, capacitance-voltage, and charge collection efficiency (CCE)
measurements up to neutron fluences of 1 × 1016
n
eq/cm2. The leakage
currents of the investigated devices remained extremely small, below 10 pA at 1.1 kV reverse bias.
In the forward bias, a remarkable drop of the current was observed, which was attributed to an
increased epi resistivity due to compensation of the epi layer doping by deep-level defects. The
CCE was evaluated for alpha particles from a radioactive source, a 62.4 MeV proton beam at the
MedAustron ion therapy center and using UV-TCT. The charge collection efficiency in reverse bias
was shown to scale directly with the 1 MeV equivalent fluence Φeq as CCE∝Φeq
-0.63±0.01. A CCE better than 50% was able to be obtained for
fluences up to 1 × 1015
n
eq/cm2. Because of the low currents in the
forward direction, particle detection was also possible in forward bias, where the CCE was found
to be increased relative to reverse bias. Furthermore, a significant dependency on the amount of
injected charge was observed, with the CCE surpassing 100% in alpha and UV-TCT measurements,
requiring further systematic investigation.