Performance of single piezoelectric vibrator micropump with check valve

Abstract

A new single vibrator piezoelectric micropump which integrated the check valve and the piezoelectric oscillator is designed in this research. The micropump mainly consists of a circular piezoelectric vibrator, a polyethylene terephthalate check valve, two rubber sealing rings, upper pump cover, and lower pump cover. In this research, in order to study output performance of the single vibrator piezoelectric pump, theoretical analysis and experimental verification of the piezoelectric pump check valve have been carried out by exploiting the method of check valves and vibrator mass separation. Experimental results show that the opening of the check valve is mainly caused by the pressure difference and the inertia force. The dominant factor of check valve opening is different under different drive frequencies. A maximum opening displacement of 19.625 μm of the check valve is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 300 Hz. In addition, the maximum flow rate of 2034.7 mL min−1 is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 320 Hz, and a maximum output pressure of 0.82 kPa is obtained when the micropump is driven by a sinusoidal voltage of 60 V at 140 Hz.

Matching the Optimal Operating Mode of Polydimethylsiloxane Check Valves by Tuning the Resonant Frequency of the Resonator in a Piezoelectric Pump for Improved Output Performance

“…According to different flow guiding elements, piezoelectric pumps can also be divided into two categories: valveless type [ 22 , 23 ] and valve type [ 24 , 25 ]. Although valveless piezoelectric pumps possess simple structures and better high-frequency characteristics, their power and efficiency are poorer than pumps with valves [ 26 ]. The valves used in piezoelectric pumps can be classified into active valves [ 27 ] and passive valves [ 28 ].…”

Research on a Piezoelectric Pump with Flexible Valves

“…The piezoelectric (PZT) pump is a PZT-driven micro-pump. By controlling its PZT film and valve body, the fluid can be transported unidirectionally, or the flow rate and pressure of the fluid can be changed [5][6][7]. With the continuous expansion of the application of the piezoelectric pump, its taxonomy is increasing in various fields.…”

Development of a piezoelectric pump with ball valve structure

“…Piezoelectric pumps can be categorised as check valve and valveless piezoelectric pumps according to whether the valve structure is used (Cheng and Tseng, 2013). Particularly, piezoelectric pumps with check valves turn out superior performance in terms of increasing energy efficiency (Dong et al, 2019). Check valves are important moving parts of piezoelectric pumps that control flow direction and bear the load when the valve is closed.…”