Performance of the APS optical slope measuring system

Qian, Jun; Sullivan, Joe; Erdmann, M.; Khounsary, Ali M.; Assoufid, Lahsen

doi:10.1016/j.nima.2012.10.102

Cited by 18 publications

(19 citation statements)

References 11 publications

Supporting

Mentioning

Contrasting

Order By: Relevance

“…Based on the consideration in Ref., 16 a highperformance gantry system for a new generation of optical slope measuring profilers has been developed at the Argonne Photon Source (APS). 17,23 In our case, we have adopted the design of the gantry system firstly developed for the HZB/BESSY-II nanometer optical measuring (NOM) surface slope profilometer. 24,25 A number of NOM-like system based on an electronic auto-collimator (AC) and a movable pentaprism are currently in use at the x-ray facilities around the world.…”

Section: And References Therein)mentioning

confidence: 99%

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Lacey

Adam

Centers

et al. 2017

Advances in Metrology for X-Ray and EUV Optics VII

View full text Add to dashboard Cite

The research and development work on the Advanced Light Source (ALS) upgrade to a diffraction limited storage ring light source, ALS-U, has brought to focus the need for near-perfect x-ray optics, capable of delivering light to experiments without significant degradation of brightness and coherence. The desired surface quality is characterized with residual (after subtraction of an ideal shape) surface slope and height errors of <50−100 nrad (rms) and <1−2 nm (rms), respectively. The ex-situ metrology that supports the optimal usage of the optics at the beamlines has to offer even higher measurement accuracy. At the ALS X-Ray Optics Laboratory, we are developing a new surface slope profiler, the Optical Surface Measuring System (OSMS), capable of two-dimensional (2D) surface-slope metrology at an absolute accuracy below the above optical specification. In this article we provide the results of comprehensive characterization of the key elements of the OSMS, a NOM-like high-precision granite gantry system with air-bearing translation and a custom-made precision air-bearing stage for tilting and flipping the surface under test. We show that the high performance of the gantry system allows implementing an original scanning mode for 2D mapping. We demonstrate the efficiency of the developed 2D mapping via comparison with 1D slope measurements performed with the same hyperbolic test mirror using the ALS developmental long trace profiler. The details of the OSMS design and the developed measuring techniques are also provided.

show abstract

Section: And References Therein)mentioning

confidence: 99%

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Lacey

Adam

Centers

et al. 2017

Advances in Metrology for X-Ray and EUV Optics VII

View full text Add to dashboard Cite

show abstract

“…Enabling an accuracy of 0.05 µrad rms for plane and slightly curved optics the BESSY-NOM represents a 2nd generation slope measuring profiler [26,27,28,37]. Further NOM or NOM-like instruments have been commissioned recently at Diamond Light Source (UK) [38], ALBA Synchrotron (Spain) [39], APS-Advanced Photon Source (USA) [40,41], NSLS-II (USA) [42] and at the LBNL / ALS -Optics and Metrology Lab in Berkeley (USA) [43]. These highly accurate instrumentation are essential for a detailed characterization of upcoming high performance reflective optical elements like extreme long super-plane mirrors for FEL application [44], diffraction limited focusing optics [45] or super-polished substrates for multilayer-monochromators [46,47].…”

Section: Slope Measuring Instruments In Use For the Inspection Of Synmentioning

confidence: 99%

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

2014

View full text Add to dashboard Cite

The requirements on the quality of ultra-precise X-ray optical components for application in the Synchrotron Radiation (SR) community are increasing continually and strongly depend on the quality of the metrology devices available to measure such optics. To meet the upcoming accuracy goal of 50 nrad rms for slope measuring profilers, a dedicated project, SIB58 Angles, consisting of 16 worldwide partners and supported by the European Metrology Research Programme (EMRP) was started in Sep 2013. The project covers investigations on autocollimators under extremely challenging measuring conditions, ray-tracing models, 2D autocollimator calibration (for the first time worldwide), determination of error sources in angle encoders providing traceability by 'sub-division of 2π rad' with nrad uncertainty, angle generation by 'ratio of two lengths' in nrad level, and on the development of portable precise Small Angle Generators (SAGs) for regular in-situ checks of autocollimators' performance. Highlights from the project will be reported in the paper and the community of metrology for X-Ray and EUV Optics will be informed about its progress and the latest work in angle metrology.

show abstract

“…Each mirror was tested individually on a high-resolution closed-loop translation stage that was capable of scanning 100 mm in both x and y directions to acquire measurement maps at predetermined surface locations. The surface profile of the profile-coated mirror was obtained by stitching together multiple overlapped subaperture measurements (Assoufid et al, 2007(Assoufid et al, , 2012Qian et al, 2012). The size of the measured surface over which figures were measured was 76.78 mm for the vertical mirror and 55.40 mm for the horizontal mirror.…”

Section: Fabrication and Metrologymentioning

confidence: 99%

Kirkpatrick–Baez mirrors to focus hard X-rays in two dimensions as fabricated, tested and installed at the Advanced Photon Source

Kujala

Marathe

Shu

et al. 2014

J Synchrotron Radiat

Self Cite

View full text Add to dashboard Cite

The micro-focusing performance for hard X-rays of a fixed-geometry elliptical Kirkpatrick-Baez (K-B) mirrors assembly fabricated, tested and finally implemented at the micro-probe beamline 8-BM of the Advanced Photon Source is reported. Testing of the K-B mirror system was performed at the optics and detector test beamline 1-BM. K-B mirrors of length 80 mm and 60 mm were fabricated by profile coating with Pt metal to produce focal lengths of 250 mm and 155 mm for 3 mrad incident angle. For the critical angle of Pt, a broad bandwidth of energies up to 20 keV applies. The classical K-B sequential mirror geometry was used, and mirrors were mounted on micro-translation stages. The beam intensity profiles were measured by differentiating the curves of intensity data measured using a wire-scanning method. A beam size of 1.3 µm (V) and 1.2 µm (H) was measured with monochromatic X-rays of 18 keV at 1-BM. After installation at 8-BM the measured focus met the design requirements. In this paper the fabrication and metrology of the K-B mirrors are reported, as well as the focusing performances of the full mirrors-plus-mount set-up at both beamlines.

show abstract

Performance of the APS optical slope measuring system

Cited by 18 publications

References 11 publications

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Development of a high performance surface slope measuring system for two-dimensional mapping of x-ray optics

Pushing the limits: latest developments in angle metrology for the inspection of ultra-precise synchrotron optics

Kirkpatrick–Baez mirrors to focus hard X-rays in two dimensions as fabricated, tested and installed at the Advanced Photon Source

Contact Info

Product

Resources

About