2024
DOI: 10.1021/acsanm.3c05612
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Periodic Al2O3 Nanohole Arrays on MgO (100) for a Low-Reflectivity External Cavity Fabry–Pérot Interferometer

Zhiqiang Li,
Cheng Lei,
Jia Liu
et al.

Abstract: Based on nanoimprint lithography and dry etching of stacked three-layer masks, we successfully prepared large-area periodic Al 2 O 3 nanohole arrays on MgO (100) substrates. At 1550 nm, the nanohole arrays increased the interface transmittance of MgO (100) from 93.2% to above 98.8%. Postannealing at 700 °C, the interface transmittance decreased only to 97.8%. Compared with typical multilayer antireflection coating, it is simpler and easier to prepare. Nanoholes are arranged in a square lattice. The radius is 2… Show more

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