2021
DOI: 10.1002/ecj.12332
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Periodic cylindrical structure of micro‐swelling silicone rubber fabricated by ArF excimer laser

Abstract: Cylindrical structure of micro-swelling silicone rubber of approximately 1 µm diameter and 1.5 to 2 µm height was fabricated by the 193-nm ArF excimer laserinduced photodissociation of Si-O bonds of silicone rubber. To be periodically, single layer of silica glass microspheres was aligned on aluminum-coated silicone rubber during laser irradiation. The silicone rubber underneath each microsphere photochemically swelled, after laser-ablating aluminum to limit a diameter of the swelling. The aluminum also adjust… Show more

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