Periodicity control of laser-induced periodic nanostructures by thin deposition layer on sapphire substrate

Miyagawa, Reina; Goto, Kenzo; Eryu, Osamu

doi:10.35848/1882-0786/abb060

Cited by 4 publications

(4 citation statements)

References 38 publications

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“…In dielectric materials and semiconductors, models of surface plasmon polaritons (SPPs) and a nano-plasmonic enhancement of laser field can be used to predict the size of LIPSS. The estimation periods (˄) using the SPPs model can be calculated using the following formula [4,12,13] :…”

Section: Resultsmentioning

confidence: 99%

Laser-Induced Periodic Nanoripples Generation on Gallium Nitride Using Near-infrared Ultrashort Pulsed Laser

Yulianto,

Titok Sugiarto,

Panji Tresna

et al. 2024

J. Phys.: Conf. Ser.

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Laser-induced periodic surface structure (LIPSS), or nanoripples, is a fascinating laser-induced surface morphology observed on a wide range of solid-state materials, with many potential applications in surface engineering, photonics, and optoelectronic devices. On the specific material of gallium nitride (GaN), the well-known formation mechanism and the potential applications of LIPSS are still being explored. Here, a near-infrared spectra of an ultrashort pulsed laser were used to generate periodic nanostructures with dimensions smaller than the laser wavelength on the surface of a GaN LED. From the result, the LIPSS maintained the direction equivalent to the GaN surface, with periodicity around 140–220 nm perpendicular to <1–100> substrate orientation. Finally, the advances in fabrication of LIPSS are presented as a potential nanograting for increasing the efficiency of LED-based GaN.

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Section: Resultsmentioning

confidence: 99%

Laser-Induced Periodic Nanoripples Generation on Gallium Nitride Using Near-infrared Ultrashort Pulsed Laser

Yulianto,

Titok Sugiarto,

Panji Tresna

et al. 2024

J. Phys.: Conf. Ser.

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“…The current main investigation on femtosecond laser-sapphire interaction is the mechanism of sub-microstructure formation. For example, Miyagawa's group deposited different materials on sapphire samples to control the laser-induced periodic surface structure and obtained low-period nanostructures [36]. However, there are relatively few studies on the application of sapphire submicron structures.…”

Section: Introductionmentioning

confidence: 99%

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Wang,

Chen,

Zhang

et al. 2024

Coatings

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Femtosecond laser processing technology is an advanced sub-micro-processing technique that enables the non-contact processing of various materials. This technology can be used to apply sub-micro structures for purposes such as hydrophilicity enhancement, optical transmittance improvement, and photonics detection. However, when it comes to processing micro/nanostructures on highly brittle materials using femtosecond lasers, there are challenges such as low processing efficiency, generation of debris, and microcracking. In this paper, we propose a method called the out-of-focus femtosecond laser direct writing technique combined with wet etching. This method offers simplicity, speed, and flexibility in preparing dense, large-area sub-microstructured surfaces on the brittle material sapphire. Our detailed investigation focuses on the impact of laser processing parameters (direct writing period, distance of focusing, direct writing speed, etc.) on the sub-microstructures of Al2O3 surfaces. The results demonstrate that this method successfully creates embedded sub-microstructures on the sapphire surface. The microholes, with a diameter of approximately 2.0 μm, contain sub-micro structures with a minimum width of 250 ± 20 nm. Additionally, we conducted experiments to assess the optical transmittance of sapphire nanostructures in the range of 350–1200 nm, which exhibited an average transmittance of approximately 77.0%. The water contact angle (CA) test yielded a result of 52 ± 2°, indicating an enhancement in the hydrophilicity of the sapphire nanostructures with only a slight reduction in optical transmittance. Our efficient fabrication of sub-microstructures on the sapphire surface of highly brittle materials offers a promising method for the production and application of brittle materials in the field of micro-optics.

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“…According to the previous works, critical laser parameters affecting the LIPSS period are wavelength, energy fluence, the number of superimposed pulses, and the ambient air pressure 18 – 22 . While these parameters affect the period of the LIPSS, actively controlling the period itself via coating material different from the sample substrate, has shown to be possible 23 . Recently, the use of femtosecond pulses from terahertz free-electron laser (THz-FEL) 24 – 28 , as well as conventional femtosecond lasers, has enabled the all-optical, contactless fabrication of structured surfaces with various periods ranging from nanoscale to microscale.…”

Section: Introductionmentioning

confidence: 99%

“…According to the previous works, critical laser parameters affecting the LIPSS period are wavelength, energy fluence, the number of superimposed pulses, and the ambient air pressure [18][19][20][21][22] . While these parameters affect the period of the LIPSS, actively controlling the period itself via coating material different from the sample substrate, has shown to be possible 23 . Recently, the use of femtosecond pulses from terahertz free-electron…”

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confidence: 99%

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

Miyagawa

Kamibayashi

Nakamura

et al. 2022

Sci Rep

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Laser-induced periodic surface structure (LIPSS), which has a period smaller than the laser wavelength, is expected to become a potential technique for fine surface processing. We report the microscopic and macroscopic observations of the crystallinity of LIPSSs, where the characteristics such as defects generation and residual strain were analyzed, respectively. The LIPSSs were formed on a Si substrate using two different femtosecond pulses from Ti:Sapphire laser with near-infrared wavelength (0.8 μm) and free-electron laser (FEL) with mid-infrared wavelength (11.4 μm). The photon energies of the former and latter lasers used here are higher and lower than the Si bandgap energies, respectively. These LIPSSs exhibit different crystalline states, where LIPSS induced by Ti:Sapphire laser show residual strain while having a stable crystallinity; in contrast, FEL-LIPSS generates defects without residual strain. This multiple analysis (microscopic and macroscopic observations) provides such previously-unknown structural characteristics with high spatial resolution. To obtain LIPSS with suitable properties and characteristics based on each application it is paramount to identify the laser sources that can achieve such properties. Therefore, identifying the structural information of the LIPSS generated by each specific laser is of great importance.

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Periodicity control of laser-induced periodic nanostructures by thin deposition layer on sapphire substrate

Cited by 4 publications

References 38 publications

Laser-Induced Periodic Nanoripples Generation on Gallium Nitride Using Near-infrared Ultrashort Pulsed Laser

Laser-Induced Periodic Nanoripples Generation on Gallium Nitride Using Near-infrared Ultrashort Pulsed Laser

A Method for Preparing Surface Sub-Microstructures on Sapphire Surfaces Using Femtosecond Laser Processing Technology

Crystallinity in periodic nanostructure surface on Si substrates induced by near- and mid-infrared femtosecond laser irradiation

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