Achieving
thermoelectric devices with high performance based on
low-cost and nontoxic materials is extremely challenging. Moreover,
as we move toward an Internet-of-Things society, a miniaturized local
power source such as a thermoelectric generator (TEG) is desired to
power increasing numbers of wireless sensors. Therefore, in this work,
an all-oxide p–n junction TEG composed of low-cost, abundant,
and nontoxic materials, such as n-type ZnO and p-type SnO
x
thin films, deposited on borosilicate glass substrate
is proposed. A type II heterojunction between SnO
x
and ZnO films was predicted by density functional theory
(DFT) calculations and confirmed experimentally by X-ray photoelectron
spectroscopy (XPS). Moreover, scanning transmission electron microscopy
(STEM) combined with energy-dispersive X-ray spectroscopy (EDS) show
a sharp interface between the SnO
x
and
ZnO layers, confirming the high quality of the p–n junction
even after annealing at 523 K. ZnO and SnO
x
thin films exhibit Seebeck coefficients (α) of ∼121
and ∼258 μV/K, respectively, at 298 K, resulting in power
factors (PF) of 180 μW/m K2 (for ZnO) and 37 μW/m
K2 (for SnO
x
). Moreover, the
thermal conductivities of ZnO and SnO
x
films are 8.7 and 1.24 W/m K, respectively, at 298 K, with no significant
changes until 575 K. The four pairs all-oxide TEG generated a maximum
power output (P
out) of 1.8 nW (≈126
μW/cm2) at a temperature difference of 160 K. The
output voltage (V
out) and output current
(I
out) at the maximum power output of
the TEG are 124 mV and 0.0146 μA, respectively. This work paves
the way for achieving a high-performance TEG device based on oxide
thin films.