Perovskite thin films grown by direct liquid injection MOCVD

A stable water-soluble molecular precursor for the preparation of stoichiometric strontium titanate

“…These metal complexes, all of which can be easily hydrolytically or thermally decomposed, are usually referred to as molecular precursors. Of these compounds, single-source precursors (SSP) possess a well-defined ratio of elements to be incorporated into the target material and often provide a low-temperature, kinetically controlled pathway to homogeneous, mixed metal oxide materials under mild conditions [6][7][8].…”

“…These metal complexes, all of which can be easily hydrolytically or thermally decomposed, are usually referred to as molecular precursors. Of these compounds, single-source precursors (SSP) possess a well-defined ratio of elements to be incorporated into the target material and often provide a low-temperature, kinetically controlled pathway to homogeneous, mixed metal oxide materials under mild conditions [6][7][8].Because of the outstanding electrical properties, titanate containing materials are the key materials in a range of electronic devices [9,10]. Specifically, strontium titanate, SrTiO 3 , is a wellknown cubic-perovskite-type paraelectric oxide with a large dielectric constant, which has attracted a great deal of attention due to its excellent dielectric, photoelectric, optical and catalytic properties [11][12][13].…”

On the Reliability of Heteronuclear Precursors-Ligand Effects in the Li-MOCVD Synthesis of SrTiO<SUB>3</SUB> Films

“…Precise explanations of the experimental device have been already presented elsewhere. 7 In this study, thin films are elaborated with a temperature of substrate T s of 700 C and a temperature of injection T inj varying from 180 C to 250 C (see Table II). All others experimental parameters (injection frequency, precursor's concentration and oxygen partial pressure in the reactive chamber) are fixed during the deposition process.…”

“…[4][5][6][7][8] For the 2,2,6,6-tetramethyl-heptane-dionate (thd) alkoxide complexes of strontium and zirconium, Sr 2 Zr 2 (thd) 4 (OR) 8 (ROH) x , it has been demonstrated that the evaporation was strongly influenced by the nature of the alkoxide ligand: the derivatives of linear chain alcohols evaporated without decomposition (just loosing the solvating alcohol), while the corresponding sec-alcohol derivative, the iso-propoxide, transformed on evaporation quantitatively into Sr 2 Zr(thd) 4 (O i Pr) 4 and "free" Zr(O i Pr) 4 , causing difficulties in maintaining the proper composition and structure in the growing film. 7 The transformation was revealed by EI-MS as both heterometallic species (with Sr:Zr =1:1 for R = n Pr, and with Sr:Zr = 2:1 for R = i Pr) were perfectly stable in the gas phase. The structure of the Sr:Zr 4 (iPrOH).…”

Atomic Layer Deposition of High‐k Oxides of the Group 4 Metals for Memory Applications

“…Perovskite-type SrZrO 3 is a high-permittivity material (k $ 60). Its properties in nanocrystalline and/or thin film form are, though, processsensitive, [82][83][84][85][86] often resulting in k-values not higher than 22.…”