electrical, and defect characteristics because carriers preferably move within the covalently bonded ribbons. Sb 2 Se 3 is a narrow band gap material with a bandgap energy of 1-1.2 eV, which can be tuned by controlling the annealing temperature. [4][5][6] Furthermore, Sb 2 Se 3 has great potential for use as a light absorber because of its high absorption coefficient (over 10 5 cm −1 in the visible light region), low toxicity, and abundance in nature, as well as its coverage of a wide response spectrum ranging from the ultra-violet (UV) to the NIR region. Despite these promising characteristics, the intrinsically low electrical conductivity of Sb 2 Se 3 remains a challenge that needs to be addressed. [7] In this regard, researchers have extensively researched Sb 2 Se 3 nanostructures, such as nanowires and nanorods, to improve their electrical conductivity because single crystals help carriers to move easily. Most of the reported Sb 2 Se 3 nanostructures were synthesized using chemical vapor deposition, which is intricate and necessarily uses chemical precursors and requires high reaction temperatures, typically between 300 and 900 °C. [8][9][10] Polycrystalline Sb 2 Se 3 thin films represent an alternative avenue for conductivity enhancement. Polycrystalline Sb 2 Se 3 thin films were prepared using various methods including vapor deposition technology, thermal evaporation, chemical bath technology, and sputtering. [2,4,6,[11][12][13] Among them, the sputtering method is considered the most suitable for thin film deposition because it offers precise control over the deposition parameters, a high film growth rate, and a relatively low cost compared to chemical vapor deposition. [5,14,16] However, during the sputtering process, selenieum (Se) loss occurs owing to the high vapor pressure of Se. To compensate for this loss, a selenization process has been adopted in various ways. For instance, Shongalova and co-workers selenized Sb 2 Se 3 thin films under hazardous H 2 Se gas flows, where, by starting with Sb-Se precursors, they deposited Sb 2 Se 3 films by means of RF magnetron sputtering. [14] Thus far, sputter-deposited Sb 2 Se 3 thin films have been mainly used to fabricate solar cells. [13][14][15][16][17] In other words, co-sputtered Sb 2 Se 3 selenization was performed mainly to improve the performance of solar cells, and studies related to Sb 2 Se 3 thin-film-based PDs have not been conducted yet.In this study, for the first time, we report the realization of high-responsivity selenized Sb 2 Se 3 -based NIR PDs by focusing on the effect of annealing temperature on device performance. Sb 2 Se 3 has great potential for applications in near-infrared sensors because of its narrow bandgap, environmental friendliness, and high absorption coefficient. However, the low conductivity of Sb 2 Se 3 is an obstacle to the further development of high-performance optoelectronic devices. In this study, to address this challenge, the selenization process is adopted. The incorporation of Se atoms into Sb 2 Se 3 facilitates the ...