Perspectives on C-MEMS and C-NEMS biotech applications

Forouzanfar, Shahrzad; Pala, Nezih; Madou, Marc; Wang, Chunlei

doi:10.1016/j.bios.2021.113119

Cited by 20 publications

(17 citation statements)

References 124 publications

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“…For example, 3D stacking of a carbonizable polymer followed by a carbonization step can be a facile pathway for fabricating 3D carbon microelectrodes, alternative to the photolithography-based fabrication route primarily used in carbon microelectromechanical system (C-MEMS) technology. [36,37] Even though the current study only used a rotating drum as a collector, replacing the drum with a high-speed X-Y stage will add more design freedom for the fabrication process, as it will allow high-speed fabrication of complex structures generated from a computer-aided design. This will be a step forward toward the scaling-up process of NFES-assisted additive micro/nanomanufacturing technology.…”

Section: Discussionmentioning

confidence: 99%

Wall Microstructures of High Aspect Ratio Enabled by Near‐Field Electrospinning

et al. 2022

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Near‐field electrospinning (NFES) holds the potential to develop into a versatile additive nanomanufacturing platform. However, the impact of a variety of processing variables remains unresolved.Herein, the effect of solvents used to prepare suitable solutions for 3D microstructuring by electrospinning is studied. 3D straight walls of stacked fibers are fabricated using a layer‐by‐layer fiber deposition approach. The effect of the choice of substrate material is also explored. The results show that a high vapor pressure, and a low dielectric constant of the solvent, as well as a high substrate conductivity facilitate improved stacking of fiber layers. Utilizing these conditions, 3D stacked walls of polyethylene oxide are fabricated, and a maximum aspect ratio of 191.7 ± 52.6, while using a chromium/gold substrate and dichloromethane/methanol as the solvent is achieved.

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Section: Discussionmentioning

confidence: 99%

Wall Microstructures of High Aspect Ratio Enabled by Near‐Field Electrospinning

et al. 2022

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“…As such, Afsarimanesh et al elaborate on planar IDEA sensors linked to many types of signal-conditioning circuits and their application in biomedical, environmental, and industrial sectors [ 21 ]. Forouzanfar et al discussed the technical aspect of the devices fabricated using C-MEMS and C-NEMS from photolithography and non-photolithography techniques, specifically for biotech applications [ 118 ]. Brosel-Oliu et al reviewed the IDEA using an impedance technique for a variety of bacteria detection explicitly in terms of bacterial growth monitoring and label-free specific bacteria [ 12 ].…”

Section: Nanocomposites Ideamentioning

confidence: 99%

Micro and Nano Interdigitated Electrode Array (IDEA)-Based MEMS/NEMS as Electrochemical Transducers: A Review

et al. 2022

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Micro and nano interdigitated electrode array (µ/n-IDEA) configurations are prominent working electrodes in the fabrication of electrochemical sensors/biosensors, as their design benefits sensor achievement. This paper reviews µ/n-IDEA as working electrodes in four-electrode electrochemical sensors in terms of two-dimensional (2D) planar IDEA and three-dimensional (3D) IDEA configurations using carbon or metal as the starting materials. In this regard, the enhancement of IDEAs-based biosensors focuses on controlling the width and gap measurements between the adjacent fingers and increases the IDEA’s height. Several distinctive methods used to expand the surface area of 3D IDEAs, such as a unique 3D IDEA design, integration of mesh, microchannel, vertically aligned carbon nanotubes (VACNT), and nanoparticles, are demonstrated and discussed. More notably, the conventional four-electrode system, consisting of reference and counter electrodes will be compared to the highly novel two-electrode system that adopts IDEA’s shape. Compared to the 2D planar IDEA, the expansion of the surface area in 3D IDEAs demonstrated significant changes in the performance of electrochemical sensors. Furthermore, the challenges faced by current IDEAs-based electrochemical biosensors and their potential solutions for future directions are presented herein.

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“…Additionally, MEMS are being manufactured using a variety of materials such as semiconductors, biomaterials, nanomaterials, magnetic, piezoelectric, ferroelectric, ceramic, and plastics [11,[21][22][23][24]. In addition, MEMS devices can be used in various applications such as sensors, actuators, switches, inertial sensors including (gyroscopes and accelerometers), optical scanners, miniature robots, micro-mirrors, and many more applications are being developed every day [25][26][27][28][29][30][31][32][33].…”

Section: Introductionmentioning

confidence: 99%

A review of piezoelectric MEMS sensors and actuators for gas detection application

et al. 2023

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Piezoelectric microelectromechanical system (piezo-MEMS)-based mass sensors including the piezoelectric microcantilevers, surface acoustic waves (SAW), quartz crystal microbalance (QCM), piezoelectric micromachined ultrasonic transducer (PMUT), and film bulk acoustic wave resonators (FBAR) are highlighted as suitable candidates for highly sensitive gas detection application. This paper presents the piezo-MEMS gas sensors’ characteristics such as their miniaturized structure, the capability of integration with readout circuit, and fabrication feasibility using multiuser technologies. The development of the piezoelectric MEMS gas sensors is investigated for the application of low-level concentration gas molecules detection. In this work, the various types of gas sensors based on piezoelectricity are investigated extensively including their operating principle, besides their material parameters as well as the critical design parameters, the device structures, and their sensing materials including the polymers, carbon, metal–organic framework, and graphene.

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Perspectives on C-MEMS and C-NEMS biotech applications

Cited by 20 publications

References 124 publications

Wall Microstructures of High Aspect Ratio Enabled by Near‐Field Electrospinning

Wall Microstructures of High Aspect Ratio Enabled by Near‐Field Electrospinning

Micro and Nano Interdigitated Electrode Array (IDEA)-Based MEMS/NEMS as Electrochemical Transducers: A Review

A review of piezoelectric MEMS sensors and actuators for gas detection application

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