2021
DOI: 10.1002/inf2.12233
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Phase‐change memory based on matched Ge‐Te, Sb‐Te, and In‐Te octahedrons: Improved electrical performances and robust thermal stability

Abstract: Phase‐change memory (PCM) has been developed for three‐dimensional (3D) data storage devices, posing huge challenges to the thermal stability and reliability of PCM. However, the low thermal stability of Ge2Sb2Te5 (GST) limits further application. Here, we demonstrate PCM based on In0.9Ge2Sb2Te5 (IGST) alloy, showing 180°C 10‐years data retention, 6 ns set speed, one order of magnitude longer life time, and 75% reduced power consumption compared to GST‐based device. The In can occupy the cationic positions and… Show more

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Cited by 21 publications
(8 citation statements)
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“…Alloying is typically needed to enhance the amorphous stability to improve the data retention temperatures. [ 14–21 ]…”
Section: Introductionmentioning
confidence: 99%
“…Alloying is typically needed to enhance the amorphous stability to improve the data retention temperatures. [ 14–21 ]…”
Section: Introductionmentioning
confidence: 99%
“…The thermal stability of PCMs is crucial for data storage. 55 After the issue of oxidation in PCMs, an important question is whether such a MOB structure can enhance the thermal stability of the material. X-ray diffraction (XRD), as a commonly used material characterization technique, can accurately identify the formation of crystalline phases in the material.…”
Section: Thermal Stability Characterization Of Thin Filmsmentioning
confidence: 99%
“…Wang et al [28] used magnetron sputtering to produce the common Ge 2 Sb 2 Te 5 films and In 0.9 Ge 2 Sb 2 Te 5 films, combined with TiN as the top electrode, to form T‐shaped PCM cells. For In 0.9 Ge 2 Sb 2 Te 5 , they found a 10‐year retention of 180°C and 6 ns set speed, as well as a reduction of the power consumption of 75%, as compared with the basic In 0.9 Ge 2 Sb 2 Te 5 .…”
Section: Ge2sb2te5 As a Typical Pcm Materialsmentioning
confidence: 99%