Phase composition, microstructure and mechanical properties of ZrC coatings produced by chemical vapor deposition

Calculation and synthesis of ZrC by CVD from ZrCl4–C3H6–H2–Ar system with high H2 percentage

“…Based on the instruction of calculation and previous experiments [17,18,24], synthesis experiments were designed to explore the influence of parameters such as temperatures, gases flux on the ZrC coating synthesis process.…”

The effect of deposition conditions on the properties of Zr-carbide, Zr-nitride and Zr-carbonitride coatings – a review

“…An advantage of CVD methods is that they can produce different forms of deposits including epitaxial, amorphous, polycrystalline and monocrystalline forms. Amongst the reported CVD methods are chemical vapor deposition in a ZrCl 4 -CH 4 -Ar system 130 and medium temperature chemical vapor deposition (MTCVD). 131 2.1.6.…”

“…Long et al 130 examined the mechanical properties, microstructure and phase composition of Zr-carbide coatings (ZrC and ZrC 0.85 ) deposited by means of chemical vapor deposition. For this purpose, X-ray diffraction (XRD) and X-ray photoelectron spectroscopy (XPS) were used for analysis.…”

Optical and mechanical properties of nanocrystalline ZrC thin films grown by pulsed laser deposition

“…Several deposition techniques have been employed to obtain ZrC thin films to investigate their properties for various applications [3][4][5][6][7][8]. Pulsed laser deposition (PLD) is a very suitable technique for such studies, since by controlling laser irradiation parameters and deposition conditions films with various structural qualities can be obtained [3,[9][10][11].…”