2010
DOI: 10.1063/1.3294694
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Phase-dependent thermal conductivity of Ge1Sb4Te7 and N:Ge1Sb4Te7 for phase change memory applications

Abstract: We report the thermal conductivities of Ge1Sb4Te7 and nitrogen-doped Ge1Sb4Te7 thin films at temperatures ranging from 300 to 520 K using the 3ω method. Thermal conductivity of Ge1Sb4Te7 increases abruptly during the transition from the amorphous to crystalline phase. Nitrogen doping effectively suppresses the crystallization process, resulting reduction of lattice as well as electronic thermal conductivity. These behaviors are confirmed by x-ray diffraction, sheet conductance, and thermal conductivity measure… Show more

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Cited by 36 publications
(19 citation statements)
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“…Furthermore, it can be clearly observed from Fig. that all the peaks are well defined and clearly correspond to fcc diffraction planes for the films annealed at 440 K and to hcp planes for films annealed at 523 K and found to be in agreement with the literature .…”
Section: Resultssupporting
confidence: 87%
“…Furthermore, it can be clearly observed from Fig. that all the peaks are well defined and clearly correspond to fcc diffraction planes for the films annealed at 440 K and to hcp planes for films annealed at 523 K and found to be in agreement with the literature .…”
Section: Resultssupporting
confidence: 87%
“…However, when the authors removed the contribution from electrons by employing the Wiedemann-Franz law (WFL), k l is reduced to around 0.7 Wm −1 K −1 [25], which is in good agreement with our calculated value. For GST147 at room temperature, our calculated lattice thermal conductivity is 1.38 Wm −1 K −1 , close to the experimental data of 1.2 Wm −1 K −1 [39], but being much higher than experimental data (0.49 Wm −1 K −1 ) from Shin and coworkers [40]. Obviously, there is large discrepancy among the different experimental results on the lattice thermal conductivity because of the different samples and measurement conditions.…”
Section: Resultssupporting
confidence: 75%
“…The amorphous nature of the as-deposited film was unveiled by the lack of diffraction peaks. After annealing at 503 K, all the diffraction peak positions are clear and exhibit preferred (103), (106), (210) and (204) orientations as previously reported [17,18] revealing that all the annealed samples have crystallized into HCP phase. However, the peaks in S1-S3 are relatively less acuminate compared to those in S4-S6.…”
Section: Morphological and Structural Analysissupporting
confidence: 79%