2021
DOI: 10.4028/www.scientific.net/msf.1035.712
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Phase Field Simulation on the Surface Morphology of Cu/Ti Nano Thin Film

Abstract: Cu/Ti binary thin film system has many applications for micro-/nano- electro mechanical systems (MEMS/NEMS), micro-electronics and optoelectronics. In nanoscale, the quality and many physical properties of nano thin films are strongly depended on its surface morphology. In the present paper the development of surface morphology of double layered Cu/Ti thin film heterostructure with different composition and thickness has been studied by using the phase field method. The developed method is based on solving Cah… Show more

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