1994
DOI: 10.1016/0040-6090(94)90105-8
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Phase formation in coevaporated NiCr thin films

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Cited by 12 publications
(7 citation statements)
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“…Chemical composition and properties of Cr60Ni40 according to ASTM 560/A 560 M [2] A second large field of applications for Cr-Ni alloys is as thin film resistors in microelectronics. For this reason, the structure and electrical properties of alloys with various Cr-Ni-ratios have been extensively studied in thin sputtered films, leading to the identification of several non-equilibrium phases [3][4][5][6].…”
Section: Introductionmentioning
confidence: 99%
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“…Chemical composition and properties of Cr60Ni40 according to ASTM 560/A 560 M [2] A second large field of applications for Cr-Ni alloys is as thin film resistors in microelectronics. For this reason, the structure and electrical properties of alloys with various Cr-Ni-ratios have been extensively studied in thin sputtered films, leading to the identification of several non-equilibrium phases [3][4][5][6].…”
Section: Introductionmentioning
confidence: 99%
“…For the binary Chromium-Nickel system, usually three equilibrium solid state phases are denoted, being each fcc Ni-and bcc Cr-rich solid solutions as well as an ordered Ni 2 Cr intermetallic phase below 590°C [3,7]. A eutectic exists which is reported by different authors ranging from 46 to 49 wt-% Ni and 1327 to 1345°C [1,7,8].…”
Section: Introductionmentioning
confidence: 99%
“…While at the eutectic temperature approximately 35 wt-% Ni can be dissolved, this drops markedly with temperature leading to only 5 wt-% below 900°C followed by a further decrease to room temperature. Precise values for the solubility of Ni in Cr at room temperature are not given [15] [16]. It should be mentioned here that besides the application as castings Cr-Ni alloys can also be found as thin sputtered films in microelectronics.…”
Section: Introductionmentioning
confidence: 99%
“…It should be mentioned here that besides the application as castings Cr-Ni alloys can also be found as thin sputtered films in microelectronics. These have been extensively studied leading to the identification of further non-equilibrium phases [15]- [21].…”
Section: Introductionmentioning
confidence: 99%
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