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NRC Publications Archive Archives des publications du CNRCThis publication could be one of several versions: author's original, accepted manuscript or the publisher's version. / La version de cette publication peut être l'une des suivantes : la version prépublication de l'auteur, la version acceptée du manuscrit ou la version de l'éditeur. For the publisher's version, please access the DOI link below./ Pour consulter la version de l'éditeur, utilisez le lien DOI ci-dessous.http://dx.doi.org/10.1007/s10971-006-6784-5Journal of Sol-Gel Science and Technology, 38, 3, pp. 271-275, 2006 Process optimization and characterization of thin films of SrFeO3-x by the pechini method Majid, Abdul; Tunney, Jim; Post, Michael; Margeson, James Highly sophisticated surface related properties, such as optical, magnetic, electronic, catalytic, mechanical, chemical and tribological properties can be obtained by advanced nanostructured coatings, making them attractive for various industrial applications. In this report we describe our efforts at developing methodology for the fabrication of SrFeO 3−x based thin films using a modified Pechini method. Thin films of SrFeO 3−x were fabricated using spin coating and a drop coating method developed in-house on Al 2 O 3 and Si-substrates. The films annealed at 600• C for one hour show a perovskite phase. The grain size increases with increase in annealing temperature. The influence of various variables such as metal to chelant ratio, drying control reagents, calcination conditions, substrate type and mode of film formation were studied using XRD, optical microscopy, SEM and AFM.