2019
DOI: 10.1364/oe.27.014903
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Phase unwrapping in optical metrology via denoised and convolutional segmentation networks

Abstract: The interferometry technique is commonly used to obtain the phase information of an object in optical metrology. The obtained wrapped phase is subject to a 2π ambiguity. To remove the ambiguity and obtain the correct phase, phase unwrapping is essential. Conventional phase unwrapping approaches are time-consuming and noise sensitive. To address those issues, we propose a new approach, where we transfer the task of phase unwrapping into a multi-class classification problem and introduce an efficient segmentatio… Show more

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Cited by 110 publications
(54 citation statements)
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References 19 publications
(32 reference statements)
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“…Nevertheless, this network is not publicly available, and thus cannot be tested on other types of biological cells. The concept of deep-learning phase unwrappers was recently demonstrated for other applications as well, including 2-D phase unwrapping in optical metrology [41,42] and lens-free imaging [43], as well as temporal phase unwrapping in fringe projection profilometry [44].…”
Section: Introductionmentioning
confidence: 99%
“…Nevertheless, this network is not publicly available, and thus cannot be tested on other types of biological cells. The concept of deep-learning phase unwrappers was recently demonstrated for other applications as well, including 2-D phase unwrapping in optical metrology [41,42] and lens-free imaging [43], as well as temporal phase unwrapping in fringe projection profilometry [44].…”
Section: Introductionmentioning
confidence: 99%
“…Recently deep learning methods have been proposed as an alternative approach for phase unwrapping to improve the speed and accuracy [ 13 , 14 , 15 , 16 , 17 , 18 ]. Some of the proposed methods are based on the use of a residual neural network [ 13 , 17 ] to directly perform the unwrapping task.…”
Section: Introductionmentioning
confidence: 99%
“…These methods can obtain the unwrapped phase directly, but with relatively large errors. Others are based on the segmentation neural network [ 14 , 15 ], where the strategy is to segment the wrapped phase and label each segment with an integer, and then train the neural network to label each segment. While those deep learning based phase unwrapping methods have different degrees of success in their targeted fields, no general deep learning based method is available to address the phase unwrapping problems in phase-shift fringe projection 3D imaging.…”
Section: Introductionmentioning
confidence: 99%
“…Specifically for the optical metrology techniques, CNNs have been applied as a phase demodulation from a single fringe pattern in projection profilometry [27], as a phase and amplitude reconstructor from a single hologram intensity pattern in holography [28], as an estimator of depth position without multiple diffraction calculations in digital holography [29], and as an optical fringe pattern denoising method in interferometry [30]. CNNs have also been applied in digital holographic interferometry, including new phase unwrapping methods, e.g., Spoorthi et al [31] proposed a phase unwrapping method using the wrapped phase as input and wrap-count as a semantic label, Zhang et al [32] presented a phase unwrapping method based on a semantic segmentation algorithm, and Zhang et al [33] generated the unwrapped phase from the combination of a denoised wrapped phase and a corrected integral multiple.…”
Section: Introductionmentioning
confidence: 99%