The small-signal impedance modeling of modular multilevel converter (MMC) is the key for analyzing resonance and stability of MMC-based ac power electronics systems. MMC is a converter system with a typical multi-frequency response due to its significant steady-state harmonic components in the arm currents, capacitor voltages, and control signals. Therefore, traditional small-signal modeling methods for 2-level voltage-source converters (VSCs) cannot be directly applied to the MMC. In this paper, the harmonic state-space (HSS) modeling approach is introduced to characterize the harmonic coupling behavior of the MMC. On this basis, the small-signal impedance models of the MMC, which take into account the internal dynamics of MMC, are developed according to the harmonic linearization principle. Furthermore, in order to reveal the impact of the internal dynamics and closed-loop control on the small-signal impedance of the MMC, three cases are considered in this paper, i.e., open-loop control, ac voltage closed-loop control, and circulating current closed-loop control. Finally, the analytical impedance models are verified by both simulation and experimental results. Index Terms-Modular multilevel converter (MMC), impedance modeling, impedance measurement, harmonic state-space (HSS), harmonic coupling. especially for renewable energy integration applications [5]-[7].The impedance-based stability analysis method is one of the preferred methods for stability analysis of power electronics systems, especially for multi-converter interconnected systems [8]- [11]. The impedance modeling of power converters is the prerequisite for applying the impedance-based analytical approach. Most of the research has so far focused on the impedance modeling of 2-level converters [9]- [14]. Sequence impedance models of 2-level grid-connected VSCs with current control and phase-locked loop (PLL) dynamics were developed in [9], [14]. DQ small-signal impedance of 2-level VSCs with closed-loop control was derived in [10]- [13]. However, very few authors have by far reported the impedance modeling of an MMC. The dc-side impedance of an MMC was derived for dc voltage ripple prediction in [15], but there is no mention of ac-side impedances. In the beginning of our previous work [6], [16], the ac-side impedance models of the MMC were developed, where, however, the capacitor voltage harmonics and high-order circulating current harmonics were ignored in the impedance modeling, resulting in imprecise impedance models. Later, the harmonic linearization method and harmonic state-space (HSS) method were introduced by the authors to develop the MMC impedance models in [17], [18], which are able to include all the steady-state harmonics of the state variables. In addition, a similar method to the HSS, so called multi-harmonic linearization method, was also proposed to model the MMC impedance in [19].MMC is a converter system with a typical multi-frequency response due to its significant steady-state harmonic components in the arm currents, capacitor volt...