Phenomenological Circuit Modeling of Ferroelectric-Driven Bulk Acoustic Wave Resonators

Peng, Wenhao; Koohi, Milad Zolfagharloo; Nam, Suhyun; Mortazawi, Amir

doi:10.1109/tmtt.2021.3130609

Cited by 1 publication

(1 citation statement)

References 38 publications

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“…Barium strontium titanate (BST) solid solutions are frequently employed in phase shifters, dielectric energy storage devices, solid-state cooling devices, and other applications because of their comparatively low loss and high tunability. [1][2][3][4] Numerous researchers have fabricated BST thin films on various substrates in accordance with their applicability in various contexts, and have evaluated the structure and electrical feature of such films. Ba 0.5 Sr 0.5 TiO 3 and BaZr 0.15 Ti 0.85 O 3 bilayer thin films were created by Mahesh et al [5] on Pt/Si plates in an effort to reduce the leakage current density.…”

Section: Introductionmentioning

confidence: 99%

Optimized Tunability of Barium Strontium Titanate Thin Films onto Different Plates with Proper Buffer Layers

Dong

Liang

Hui

et al. 2022

Physica Status Solidi (b)

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Misfit strain, polarization, permittivity, and tunability of Ba x Sr1−x TiO3 (BST) thin films on various substrates with varied buffer layers are calculated by a modified thermodynamic model. The lattice parameters of the LaAlO3 (LAO), CaTiO3 (CT), BaZr0.25Ti0.75O3 (BZT), and MgO buffer layers grow consecutively as does the thermal expansion coefficient (TEC) of the Si, Ti, Ni, and stainless steel (SS) substrates. When the TEC of substrates is bigger (such as Ni, SS) than that of the films, introducing buffer layers with larger lattice parameters (such as BZT, MgO) can improve the permittivity and tunability. Conversely, inserting buffer layers with smaller lattice parameters (such as LAO, CT) can enhance the dielectric response when the TEC of substrates is smaller (such as Si, Ti) than that of the films. The relationship between the TEC of substrate and the lattice parameter of buffer layer is primarily linear for achieving high tunability. According to several references, introducing LaNiO3 buffer layers can significantly increase the tunability of BST solid solutions prepared on Si‐based substrates, which is in line with the estimated rule. This law offers a guide for choosing the best substrate and buffer layer when producing BST films with strong dielectric response.

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