Phenomenological Modelling Sensitivity of SU8/CB Nanocomposite Conducting Polymer Microcantilever Biosensor

Bisen, Mahak; Ansari, Mohd. Zahid

doi:10.1016/j.matpr.2017.06.387

Cited by 4 publications

(3 citation statements)

References 8 publications

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“…The performance optimization of cantilever sensors using various innovative designs and process optimizations has been also reported. Sensor performance optimization has been carried out by careful structural optimization [ 204 – 207 ] and material selection [ 208 – 210 ]. The performance of SU-8 polymeric piezoresistive micro-cantilever sensors is determined not only by electrical sensitivity governed by material parameters of piezoresistor gauge factor and Young’s modulus of structural layer, but also by geometrical factors and noises (both intrinsic and extrinsic).…”

Section: Evolution: Solid-state Semiconductor To Polymeric Cantilevermentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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In the last decade, microelectromechanical systems (MEMS) SU-8 polymeric cantilevers with piezoresistive readout combined with the advances in molecular recognition techniques have found versatile applications, especially in the field of chemical and biological sensing. Compared to conventional solid-state semiconductor-based piezoresistive cantilever sensors, SU-8 polymeric cantilevers have advantages in terms of better sensitivity along with reduced material and fabrication cost. In recent times, numerous researchers have investigated their potential as a sensing platform due to high performance-to-cost ratio of SU-8 polymer-based cantilever sensors. In this article, we critically review the design, fabrication, and performance aspects of surface stress-based piezoresistive SU-8 polymeric cantilever sensors. The evolution of surface stress-based piezoresistive cantilever sensors from solid-state semiconductor materials to polymers, especially SU-8 polymer, is discussed in detail. Theoretical principles of surface stress generation and their application in cantilever sensing technology are also devised. Variants of SU-8 polymeric cantilevers with different composition of materials in cantilever stacks are explained. Furthermore, the interdependence of the material selection, geometrical design parameters, and fabrication process of piezoresistive SU-8 polymeric cantilever sensors and their cumulative impact on the sensor response are also explained in detail. In addition to the design-, fabrication-, and performance-related factors, this article also describes various challenges in engineering SU-8 polymeric cantilevers as a universal sensing platform such as temperature and moisture vulnerability. This review article would serve as a guideline for researchers to understand specifics and functionality of surface stress-based piezoresistive SU-8 cantilever sensors.

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Section: Evolution: Solid-state Semiconductor To Polymeric Cantilevermentioning

confidence: 99%

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Mathew

Sankar

2018

Nano-Micro Lett.

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“…Surface stress-induced biosensors hold remarkable potential for diverse applications in biomolecules and cell detection due to their label-free technology, direct detection method, and simple preparation [1][2][3][4][5][6][7]. The biosensor depends on the deformation of the sensitive element to sense surface stress generated during the biomolecule interactions [8][9][10][11].…”

Section: Introductionmentioning

confidence: 99%

Surface stress‐induced membrane biosensor based on double‐layer stable gold nanostructures forE. colidetection

Zhao

Liu

Pei

et al. 2019

IET nanobiotechnol.

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The surface stress-based biosensor has been applied in fast and sensitive identification of Escherichia coli (E. coli)with significance for public health, food, and water safety. However, the stable sensitive element of flexible biosensor based on surface stress is still crucial and challengeable. Here, the authors reported surface stress-induced biosensors based on double-layer stable gold nanostructures (D-AuNS-SSMB) for E. coli O157:H7 detection. Bacterial detection demonstrates the high stability of the biosensor. The resistance change of biosensor is linear to the logarithmic value of the E. coli O157:H7 concentrations ranging from 10 3 to 10 7 CFU/mL with a limit of detection (LOD) of 43 CFU/mL. The captured signals of D-AuNS-SSMB comes from surface stress generated by antigen-antibody binding. In addition, the biosensor exhibits good stability, reproducibility and specificity in detection of E. coli O157:H7 as well. This study provides a new preparation method of stable sensitive element for the E. coli detection.

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“…Typical applications of piezoresistive cantilever biosensors include the detection of viruses [1], cancer cells [2], cardiac disease markers [3], DNA sequencing [4], etc. The literature encompasses examples where a few researchers have performed meticulous material selection and geometrical optimization of NEMS devices to maximize their device performance metrics [5][6][7][8][9][10]. Based on the material, piezoresistive cantilever surface stress sensors are broadly classified as either polymer-based sensors, such as SU-8 [11] or parylene [12], or solid-state semiconductors, such as silicon [13], silicon nitride [14] and silicon dioxide [15] based sensors.…”

Section: Introductionmentioning

confidence: 99%

Optimization of a nano-cantilever biosensor for reduced self-heating effects and improved performance metrics

Mathew

Sankar

2018

J. Micromech. Microeng.

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Over the last decade, surface stress-based piezoresistive cantilever biosensors have been extensively explored as a potential alternative for conventional clinical diagnostic techniques. The design of piezoresistive cantilever sensors is a complex multi-variable problem which involves the interplay between the thermal, electrical and mechanical design aspects of their constituent materials and geometry. Even though the literature includes examples where researchers have devised designs of piezoresistive cantilever biosensors, a majority of them have focused primarily on improving the electrical sensitivity by either dimensional optimization or material changes of their constituent layers. However, there are two important aspects of the sensor design which have been seldom addressed: (i) the negative impact of the transverse section of the U-shaped piezoresistor on the electrical sensitivity, and (ii) thermal drift in the output characteristics of the sensor. Although a few researchers have focused on the aforementioned factors, they have analysed them independently without considering their interdependence and cumulative impact on the sensor performance. In this paper, we devise a dual material multi-part U-shaped piezoresistor comprised of two p-type single crystalline silicon longitudinal sections and a p-type polysilicon transverse section. Evaluation of the proposed piezoresistor is performed in two stages using a finite element method-based numerical tool. In the first stage, the performance of the sensor with the multi-part piezoresistor is compared with the reported piezoresistors available in the literature. In the second stage, a comprehensive investigation of the multi-part piezoresistor is carried out to maximize the sensor performance. Results show that, compared to a conventional U-shaped piezoresistor, the proposed piezoresistor achieves improvement in the sensitivity ratio by 8.12 times.

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Phenomenological Modelling Sensitivity of SU8/CB Nanocomposite Conducting Polymer Microcantilever Biosensor

Cited by 4 publications

References 8 publications

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

A Review on Surface Stress-Based Miniaturized Piezoresistive SU-8 Polymeric Cantilever Sensors

Surface stress‐induced membrane biosensor based on double‐layer stable gold nanostructures forE. colidetection

Optimization of a nano-cantilever biosensor for reduced self-heating effects and improved performance metrics

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