The temperature-dependent damping of quantum-mechanical interference patterns from surface-state electrons scattering off steps on Ag͑111͒ and Cu͑111͒ has been studied using scanning tunneling microscopy ͑STM͒ and spectroscopy in the temperature range 3.5-178 K. The thermal damping of the electron standing waves is described quantitatively within a simple plane-wave model accounting for thermal broadening due to the broadening of the Fermi-Dirac distributions of sample and tip, for beating effects between electrons with different k ͉͉ vectors, and for inelastic collisions of the electrons, e.g., with phonons. Our measurements reveal that Fermi-Dirac broadening fully explains the observed damping for Ag and Cu. From the analysis of our data, lower limits of the phase-relaxation lengths at the Fermi energy E F of the two-dimensional electron gas of L (E F )տ600 Å at 3.5 K and տ250 Å at 77 K for Ag͑111͒, and of L (E F )տ660 Å at 77 K and տ160 Å at 178 K for Cu͑111͒ are deduced. In contrast to integral measurements such as photoemission we measure L close to E F and also locally. The latter eliminates residual line widths due to surface defect scattering found in the integrating techniques. Our STM results, therefore, currently provide a very good absolute estimate of L and the inelastic lifetime ϭL /v F , respectively. Our values can be combined with photoemission results on dL /dT to derive the inelastic lifetime of surface state electrons at any T. ͓S0163-1829͑99͒02524-2͔