1999
DOI: 10.1016/s0921-4526(98)01204-6
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Phonon scattering related to oxygen precipitation in Cz-silicon

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Cited by 4 publications
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“…For concentrations below 5×10 11 cm −3 , electrically active impurities can be detected, for example, by electron spin or photothermal ionization spectroscopy. Oxygen concentrations below 10 13 cm −3 were recently determined by means of phonon spectroscopy (Zeller et al 1999) with superconducting tunnelling junctions. Besides optical spectroscopy, a wide range of mass spectroscopy methods can also be used to obtain impurity concentrations.…”
Section: Materials Characterizationmentioning
confidence: 99%
“…For concentrations below 5×10 11 cm −3 , electrically active impurities can be detected, for example, by electron spin or photothermal ionization spectroscopy. Oxygen concentrations below 10 13 cm −3 were recently determined by means of phonon spectroscopy (Zeller et al 1999) with superconducting tunnelling junctions. Besides optical spectroscopy, a wide range of mass spectroscopy methods can also be used to obtain impurity concentrations.…”
Section: Materials Characterizationmentioning
confidence: 99%