2012
DOI: 10.1002/pssc.201200241
|View full text |Cite
|
Sign up to set email alerts
|

Phosphorous doping of superlattice silicon quantum dots in silicon dioxide

Abstract: Here we investigate the effects of phosphorous (P) doping of silicon quantum dots in a silicon dioxide superlattice structure. The doping occurs by diffusion of P during high‐temperature annealing from P‐rich silicon dioxide regions to directly adjacent layers containing the quantum dots embedded in oxide. Secondary ion mass spectroscopy (SIMS) is used to clearly show that after annealing, the P preferentially resides in the regions containing the dots. Once in these regions, electron paramagnetic resonance (E… Show more

Help me understand this report

Search citation statements

Order By: Relevance

Paper Sections

Select...
1

Citation Types

0
1
0

Year Published

2014
2014
2016
2016

Publication Types

Select...
4
1

Relationship

0
5

Authors

Journals

citations
Cited by 5 publications
(2 citation statements)
references
References 0 publications
0
1
0
Order By: Relevance
“…[2][3][4][5][6][7][8][9][10][11][12][13][14][15] In particular, it has been shown that electrically-activated impurity atoms located in substitutional sites tend to enhance the conductivity. [6][7][8][9][10] Theoretically, several works have studied the formation and ionization energies, and the opto-electronic properties of freestanding doped SiQDs.…”
Section: Introductionmentioning
confidence: 99%
“…[2][3][4][5][6][7][8][9][10][11][12][13][14][15] In particular, it has been shown that electrically-activated impurity atoms located in substitutional sites tend to enhance the conductivity. [6][7][8][9][10] Theoretically, several works have studied the formation and ionization energies, and the opto-electronic properties of freestanding doped SiQDs.…”
Section: Introductionmentioning
confidence: 99%
“…Electron Spin Resonance (ESR) characterisation has previously been used to characterize n-type Si NCs. 11,12 From ESR characterisation, the slight increase in the photoluminescence (PL) intensity from P-doped Si NCs was understood to be due to inactivation of non-radiative recombination centres at the interface. 13 ESR on the shallow acceptor centres is not possible due to line broadening unless the NCs in the Si matrix are of a high degree of perfection, 14 a condition which is not in favour of Si NCs grown by the sputter-anneal method.…”
mentioning
confidence: 99%