“…Because TiO 2 exists in three different crystalline forms, i.e., anatase (tetragonal), rutile (tetragonal), and brookite (orthorhombic), a formation of its phase depends on deposition method, starting material, and deposition temperature. Many methods for preparing the TiO 2 thin films include sol-gel coating [5,6], plasma enhanced chemical vapor deposition [6,7], electron-beam evaporation, [8] and magnetron sputtering [9][10][11]. Among them, a pulsed dc magnetron sputtering method is the most advantageous in controlling the structure and composition of the TiO 2 thin films due to its easiness to adjust deposition condition.…”