Molecular electronics [1,2] is a promising field of research based on the idea that a single molecule or two dimensional assemblies of molecules (monomolecular films) can work as wires, switches, rectifiers, etc. Molecules are the smallest functional units and therefore it is expected that the use of molecules will permit to catch up with the limits of miniaturization (MM: more Moore), with an increase in device density by a factor of several orders of magnitude compared to today's state of the art. At the same time due to quantum effects novel and remarkable properties of organic and organometallic compounds at the nanoscale devices will result in increased performance (MtM: more than Moore) together with the appearance of new functions not possible with conventional semiconductors, and also cheaper devices due to the non-dependence of expensive materials used today in CMOS (complementary metal-oxide semiconductor) technology such as hafnium oxide. Nowadays, the number of research groups from different disciplines of science contributing to molecular electronics is gradually growing, and this field is becoming of great scientific and technological interest [1,3-8]. Since the seminal work of Aviram and Ratner in 1974 who firstly suggested that a single molecule could function as a rectifier [9], molecules have been experimentally demonstrated to work as switches, molecular wires or rectifiers, and a new field of opportunities is opened due to the understanding of electron transport through single entities or assemblies of molecules and expansion towards work on molecular spintronics, vibronic effects, excitation of the molecular junction with polarized light, quantum interference and decoherence, molecular chirality, molecular stretching and distortion as well as work on thermoelectric response in molecular junctions.Abstract: It is expected that molecular electronics, i.e., the use of molecules as critical functional elements in electronic devices, will lead in the near future to an industrial exploitable novel technology, which will open new routes to high value-added electronic products. However, despite the enormous advances in this field several scientific and technological challenges should be surmounted before molecular electronics can be implemented in the market. Among these challenges are the fabrication of reliable, robust and uniform contacts between molecules and electrodes, the deposition of the second (top) contact electrode, and development of assembly strategies for precise placement of molecular materials within device structures. This review covers advances in nanofabrication techniques used for the assembly of monomolecular films onto conducting or semiconducting substrates as well as recent methods developed for the deposition of the top contact electrode highlighting the advantages and limitations of the several approaches used in the literature. This contribution also aims to define areas of outstanding challenges in the nanofabrication of monomolecular layers sandwiched between two electro...