2007
DOI: 10.1142/s0217979207037806
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PHOTOACOUSTIC STUDIES ON TiAlN NANOSTRUCTURED THIN FILMS

Abstract: Nanostructured titanium aluminium nitride (TiAlN) thin films were prepared on Si (111) substrate by reactive DC magnetron sputtering technique for various N 2 flow rates. Xray diffraction showed that the films are nanocrystalline and the grain size decreases from 14 nm to 5 nm as the N 2 flow rate is increased. The thermal properties are then studied by photoacoustic (PA) spectroscopy. The study revealed an increase in thermal diffusivity and conductivity with increasing N 2 flow rates, and the measured values… Show more

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Cited by 5 publications
(4 citation statements)
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“…7 W m 21 K 21 as the nitrogen flow rate is increased from 0 to 30 sccm. 32 The observed increase in the thermal conductivity with increasing nitrogen flow rates could be due to the decrease in the grain size at higher nitrogen flow rates. This has been attributed to the increased mean free path resulting in lower phonon scattering.…”
Section: Resistivity and Hardness Measurementsmentioning
confidence: 96%
“…7 W m 21 K 21 as the nitrogen flow rate is increased from 0 to 30 sccm. 32 The observed increase in the thermal conductivity with increasing nitrogen flow rates could be due to the decrease in the grain size at higher nitrogen flow rates. This has been attributed to the increased mean free path resulting in lower phonon scattering.…”
Section: Resistivity and Hardness Measurementsmentioning
confidence: 96%
“…In some specific high-speed tool applications, a lower thermal diffusivity of the coatings is advisable, which serves as a thermal barrier layer and can effectively delay the temperature transfer to the tool substrate materials. Srinivasan et al [13] have studied the thermal properties of Ti–Al–N thin films deposited on a silicon substrate with various N 2 flow rates by using the photoacoustic technique. They observed a decrease in thermal diffusivity and conductivity with decreasing N 2 flow rates.…”
Section: Introductionmentioning
confidence: 99%
“…Increase in K 1 is understandable according to the physics of materials, where increase in density can increase in thermal conductivity. 24 Similarly for a fluid with a greater density, its thermal conductivity could be higher as compared to a lower density fluid. It was confirmed from the microscopic images that the cell has shrunk during eryptosis, which increases the density.…”
Section: Discussionmentioning
confidence: 99%