Photoassisted scanning-probe nanolithography on Ti films

Ageev, A. O.; Коноплев, Б. Г.; Polyakov, V. V.; Svetlichnyi, A. M.; Smirnov, V. A.

doi:10.1134/s1063739707060017

Cited by 18 publications

(15 citation statements)

References 2 publications

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“…Development of the technology of the production of microelectronic and nanoelectronic elements on the basis of metal-oxide nanostructures (ONSs) is connected with the investigation of their properties and the study of the processes of modification of the substrate surface with nanometer resolution [1][2][3][4].…”

Section: Introductionmentioning

confidence: 99%

“…[1][2][3][4][5][6]. In addition, titanium oxide was used to fabricate matrices of memristors that offer promise in the production of nonvolatile resistive random-access memory (RRAM) elements with a high-speed response, a small-sized data recording cell, and low power consumption [7,8].…”

Section: Introductionmentioning

confidence: 99%

“…In addition, the LAO technique is distinguished by a high spatial resolution, the possibility of applying in situ diagnostics of the process of ONS formation, and a lack of additional technological operations of deposition, exposure, and etching of the photoresist [2,3,[5][6][7].…”

Section: Introductionmentioning

confidence: 99%

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Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

et al. 2016

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The results of experimental studies of the phase composition of oxide nanostructures formed by the local anodic oxidation of a titanium thin film are reported. The data of the phase analysis of titanium-oxide nanostructures are obtained by X-ray photoelectron spectroscopy in the ion profiling mode of measurements. It is established that the surface of titanium-oxide nanostructures 4.5 ± 0.2 nm in height possesses a binding energy of core levels characteristic of TiO 2 (458.4 eV). By analyzing the titanium-oxide nanostructures in depth by X-ray photoelectron spectroscopy, the formation of phases with binding energies of core levels characteristic of Ti 2 O 3 (456.6 eV) and TiO (454.8 eV) is established. The results can be used in developing the technological processes of the formation of a future electronic-component base for nanoelectronics on the basis of titanium-oxide nanostructures and probe nanotechnologies.

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Section: Introductionmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

et al. 2016

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“…The use of SPM allows one to study the local geometric, electrical, and mechanical properties of the substrate surface and form nanodimensional structures on the surface of solids [1][2][3][4][5][6]. The resolu tion of SPM methods is defined by many factors, most of which are geomentical properties, specifically, the rounding radius and aspect ratio of the point sides [6].…”

Section: Introductionmentioning

confidence: 99%

Probe modification for scanning-probe microscopy by the focused ion beam method

et al. 2012

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“…Local anode oxidation (LAO) monitored by an atomic force micro scope (AFM) is a method alternative to nanolithogra phy, which makes it possible to solve a number of problems in classical methods of formation of nano structures, associated with radiation sources, the com plexity and high cost of lithographic systems, and large time expenditures for technological processes. The LAO method makes it possible to form oxide nano structures (ONSs) on the surface of various materials that can be used in the development and preparation of elements of micro and nanoelectronics, resistive memory, lithographic masks, and catalytic centers of activation and growths of filamented nanostructures [2][3][4][5][6][7]. The ONSs based on TiO 2 are widely used for preparing resistive storage devices [8].…”

Section: Introductionmentioning

confidence: 99%

Simulation of the formation of nanosize oxide structures by local anode oxidation of the metal surface

et al. 2015

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We propose a complex model of local anode oxidation of metals taking into account the processes occurring in the probe-substrate system in dry air, in water vapor, and in the water film adsorbed on the sub strate surface. It is shown that local anode oxidation occurs due to generation of oxygen ions as a result of decomposition of water molecules in an electric field; the predominant source of oxidizer is the film of water adsorbed on the substrate surface. The results of numerical simulation of local anode oxidation of titanium demonstrate good correlation with experimental dependences of the height of oxide nanostructures on the duration of local anode oxidation, which confirms the effectiveness of the proposed model. Our results can be used in the development of technological processes of formation of elements of nanoelectronics by local anode oxidation.

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Photoassisted scanning-probe nanolithography on Ti films

Cited by 18 publications

References 2 publications

Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

Study of the phase composition of nanostructures produced by the local anodic oxidation of titanium films

Probe modification for scanning-probe microscopy by the focused ion beam method

Simulation of the formation of nanosize oxide structures by local anode oxidation of the metal surface

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