Photochemical Vapour Deposition of Thin Films

Irvine, S.J.C.

doi:10.1007/978-94-010-0353-7_9

Cited by 1 publication

(1 citation statement)

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“…One option is to provide a localized energy input for CVD, which is frequently accomplished through laser irradiation. [ 7,8 ] However, the spatial resolution achievable through this method is typically restricted by the wavelength of the laser light employed. Although there has been recent evidence that this issue can be addressed in thermally decoupled 3D gold structures, [ 9 ] the range of achievable structure geometries remains restricted.…”

Section: Introductionmentioning

confidence: 99%

Area‐Selective Chemical Vapor Deposition of Gold by Electron Beam Seeding

Tsarapkin,

Maćkosz,

Jureddy

et al. 2024

Advanced Materials

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Chemical vapor deposition (CVD) is an established method for producing high‐purity thin films, but it typically necessitates the pre‐ and post‐processing using a mask to produce structures. This paper presents a novel maskless patterning technique that enables area selective CVD of gold. A focused electron beam is used to decompose the metal‐organic precursor Au(acac)Me2 locally, thereby creating an autocatalytically active seed layer for subsequent CVD with the same precursor. The procedure could be included in the same CVD process without the need for clean room lithographic processing. Moreover, it operates at low temperatures of 80 °C, over 200 K lower than standard CVD temperatures for this precursor, reducing thermal load on the specimen. Given that electron beam seeding operates on any even moderately conductive surface, the process does not constrain device design. This is demonstrated by the example of vertical nanostructures with high aspect ratios of around 40:1 and more. Written using a focused electron beam and the same precursor, these nanopillars exhibit catalytically active nuclei on their surface. Furthermore, by using the onset of the autocatalytic CVD growth, for the first time the local temperature increase caused by the writing of nanostructures with an electron beam could be precisely determined.This article is protected by copyright. All rights reserved

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Section: Introductionmentioning

confidence: 99%