“…Examples of external stimuli include heat, 24 mechanical force 25 or, more commonly, irradiation with a specific wavelength of light. [26][27][28] Light-induced catalysis is of particular importance in the area of photolithography, where photoacid generators (PAGs) eject protons upon irradiation, 29,30 which mediate the deprotection of photoresist polymers and allow for patterning to sub-20 nm resolution. Given the importance of B(C 6 F 5 ) 3 and other perfluoroaryl boranes as Lewis acid catalysts for siloxane synthesis and modification, we became interested in devising molecules that, when irradiated, would liberate this borane.…”