“…Zhang et al reported that high-quality and large-scale MoS2 films can be obtained by providing controllable deposition of films using the sputtering technique, also MoS2/Si-based devices with high performance can be developed [23]. As far as it can be seen from the literature, there are few studies on the electrical characteristics of MoS2/p-Si heterostructured diodes in which different metal electrodes are developed by vacuum techniques [24,25]. Besides, developing heterostructured devices, it can be considered that these studies aim to reach high-performance devices through the integration of twodimensional materials such as MoS2 with Si-based electronics [26].…”