Photoelectron microscope for x-ray microscopy and microanalysis

Abstract

The characterization and microanalysis of films with Auger and xray photoelectron spectroscopies J. Vac. Sci. Technol. A 4, 2900 (1986); 10.1116/1.573655 XRay Microscopy and XRay Microanalysis Phys. Today 15, 54 (1962); 10.1063/1.3058328 X-ray Microscopy and X-ray Microanalysis Am.Synchrotron radiation has recently contributed to the development of high-resolution x-ray microscopy either for biological investigations or for chemical microanalysis. Contact microscopy for this end appears to be particularly useful, but is mainly limited by the detectors that are used. In order to overcome these limitations-i.e., to obtain real time imaging and quantitative information-a study of a photoelectron x-ray microscope is made. Contact configuration is used, but the usual detector is replaced by a thin photocathode, The emitted secondary photoelectrons are then imaged by a suitable emission electron microscope. Problems of photoemission, resolution, and D.Q.E. limitation are discussed. The particular nature of electron lens aberrations, due to photoemission characteristics, is taken into account. The conclusions are that resolutions down to 500 A can be obtained in certain conditions. A preliminary low-magnification experiment is described and results are shown.

Soft X-ray microscopes and their biological applications

“…As an alternative to photoresist recording, Polack et al have developed a contact microscope where a photoemitting surface is used instead of a resist detector. The electrons from the photoemitter pass through an electron optical column to yield a magnified image (Polack & Lowenthal, 1981;Polack et al 1988). This scheme is the basis of a commercially available instrument called the zooming tube (Kinoshita et al 1992;Matsumura et al 1994).…”

X-Ray Biomicroholography

“…(35) and (38). Table I compares the coherence and specimen volume requirements for the forms of holography we have discussed.…”

“…(27) rx Therefore the maximum allowable distance between specimen and recording surface is (I -1)3 (35) We call this the "coherence limit. "…”

Spin-sensitive magnetic microscopy with circularly polarized X-rays

“…The PRISM instrument, which is now being tested on bending magnet sources, is designed to perform high resolution micro-XAFS, as well as microscopy with primary photoelectrons and Auger electrons. The energy filter solves the chromatic aberration problem that has prevented high resolution in the X-PEEM, as was first recognized by Polack and Lowenthal [20]. It should be pointed out that all of our X-PEEM work so far has been carried out on bending-magnet synchrotron beamlines, so a tremendous gain in intensity is expected in late 1994 when experiments on undulator beamlines begin.…”