We report time-of-flight mass spectrometric studies of neutral gas-phase species generated in 532 and 355
nm laser ablation of Sn and SnO2 targets at intensities of ≈108 W cm-2, below the plasma threshold. A
wavelength-dependent yield of Sn:Sn
x
O
y
species is observed for the oxide target, with Sn
x
O
x
(x = 1−3) the
primary products at 532 nm and atomic Sn dominant at 355 nm. Sn and Sn2 are the primary products of Sn
metal ablation, and the relative Sn:Sn2 yield increases at the shorter wavelength. The speed distributions of
neutrals ejected from the oxide target are well represented by unshifted time-transformed Maxwell−Boltzmann
(MB) distributions, while those ejected from the metal target exhibit bimodal MB distributions. Typical most-probable speeds are (1−2) × 105 cm s-1, with peak kinetic energies (KEs) of 1−2 eV. The implications of
our results for pulsed laser deposition of SnO
x
films will be emphasized.