Microelectronics, Microsystems and Nanotechnology 2001
DOI: 10.1142/9789812810861_0022
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Photolithographic Materials for Novel Biocompatible Lift Off Processes

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Cited by 22 publications
(38 citation statements)
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“…18, 21,22 To produce a successful coating, the supercritical solvent system must dissolve the block copolymer but not the PS substrate. Polymers with low Tg or low surface tension are prone to dissolution in scCO 2 since their polymer-polymer interactions are weak while the polymer-CO 2 interaction is relatively strong.…”
Section: Resultsmentioning
confidence: 99%
“…18, 21,22 To produce a successful coating, the supercritical solvent system must dissolve the block copolymer but not the PS substrate. Polymers with low Tg or low surface tension are prone to dissolution in scCO 2 since their polymer-polymer interactions are weak while the polymer-CO 2 interaction is relatively strong.…”
Section: Resultsmentioning
confidence: 99%
“…45,46 An optimum concentration can be determined that permits dissolution of the exposed resist and, at the same time, enhanced resolution. The well established biocompatibility of PHEMA homopolymer could be further exploited in the Negative tone imaging.…”
Section: Micropatterning Resultsmentioning
confidence: 99%
“…biomolecule micro-array fabrication, or environmentally friendly lithography. 45,46 In the present paper, both positive and negative imaging chemistries and the micropatterning possibilities offered by using poly(2-hydroxyethyl methacrylate, PHEMA) and poly(2-hydroxypropyl methacrylate, PHPMA) under exposure to UV and electron-beam radiation are explored. Emphasis is given to the elucidation of reaction mechanisms using mass spectroscopy and the relation with imaging chemistries encountered in other poly(methacrylate) homopolymer and copolymer based lithographic materials.…”
Section: Introductionmentioning
confidence: 99%
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“…Block copolymer, P(S-b-tBA) was chosen to modify PS microspheres for several reasons: after deposition, the PtBA block is thermodynamically driven to air-polymer interface via preferential surface segregation because of its lower surface tension,while the PS block interpenetrates with the PS microspheres due to its higher surface tension and identical chemistry with substrate. That is, P(S-b-tBA) acts as surfactant and orders at the modified surfaces; PtBA is expected to be slightly soluble in scCO 2 [24,25] that makes P(S-b-tBA) soluble in scCO 2 with a small amount of organic cosolvent; and finally, it initially offers a tert-butyl ester groups covered hydrophobic surface to satisfy the need of a release surface, but can also generate a hydrophilic one by photolytic or acid catalyzed hydrolysis of the tert-butyl ester groups to carboxyl groups [26] .…”
Section: Results and Disscussionmentioning
confidence: 99%