Photolithography-based carbon nanotubes patterning for field emission displays

Cho, Young-Rae; Lee, Jin Ho; Song, Yinglin; Kang, Seok Hun; Hwang, Chi‐Sun; Jung, Man‐Young; Kim, Do-Hyung; Lee, Sangkyun; Uhm, Hyun‐Seok; Cho, Kyoung Ik

doi:10.1016/s0921-5107(00)00565-1

Cited by 38 publications

(10 citation statements)

References 10 publications

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“…Multiwalled carbon nanotube microarray membranes (CNT-MMs) fabricated by this method thereby provide a versatile microstructure for reagentbased burst-propulsion. Thus, this distinct CNT-templated microfabrication process enables the growth of aligned, high aspect ratio CNT microchannel membranes ; a three-dimensional microstructure that cannot be formed from conventional, stand-alone CNT fabrication techniques such as screen-printing, 26,27 electropraying, 28 alcohol catalytic chemical vapor deposition, 29 plasma-enhanced chemical vapor deposition, 30À32 selfassembled monolayer linking, 33 and thermal crosslinking. 34 Electroless deposition of Pt onto CNTs has been demonstrated in the literature; CNT-MM structures can be functionalized in like manner to provide highly catalytic microstructures for burst-propulsion applications.…”

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confidence: 99%

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

et al. 2015

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The utility of unmanned micro underwater vehicles (MUVs) is paramount for exploring confined spaces, but their spatial agility is often impaired when maneuvers require burst-propulsion. Herein we develop highaspect ratio (150:1), multiwalled carbon nanotube microarray membranes (CNT-MMs) for propulsive, MUV thrust generation by the decomposition of hydrogen peroxide (H 2 O 2 ). The CNT-MMs are grown via chemical vapor deposition with diamond shaped pores (nominal diagonal dimensions of 4.5 × 9.0 μm) and subsequently decorated with urchin-like, platinum (Pt) nanoparticles via a facile, electroless, chemical deposition process. The Pt-CNT-MMs display robust, high catalytic ability with an effective activation energy of 26.96 kJ mol -1 capable of producing a thrust of 0.209 ± 0.049 N from 50% [w/w] H 2 O 2 decomposition within a compact reaction chamber of eight Pt-CNT-MMs in series. A n upward trend in the research and use of unmanned underwater vehicles (UUVs), and in particular micro underwater vehicles (MUVs, small UUVS between 1 and 50 cm in length), for exploration of confined spaces such as ship wrecks, submerged oil pipelines, and various military purposes has been observed over recent years. 1À3 The locomotion of these vehicles is typically controlled by propellerbased systems, which are often used for long-endurance missions. 4À6 However, propeller-based systems are usually limited in their ability to perform tight radius turns, burst-driven docking maneuvers, and lowspeed course corrections. ABSTRACT The utility of unmanned micro underwater vehicles (MUVs) is paramount for exploring confined spaces, but their spatial

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confidence: 99%

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

et al. 2015

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“…The CNT rolled up by a single layer of graphene is single-walled carbon nanotubes and the CNT rolled up by several layers of graphene is multiwalled carbon nanotube. The diameter of CNT is about 1 ∼ 50 nm and the length is up to few microns [14,15]. So CNT is considered as the a typical one-dimensional nanomaterial.…”

Section: Structure Of Cntmentioning

confidence: 99%

Progress in Studies on Carbon and Silicon Carbide Nanocomposite Materials

Chen

2010

Journal of Nanomaterials

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Silicon carbide nanofiber and carbon nanotubes are introduced. The structure and application of nanotubers (nanofibers) in carbon/carbon composites are emphatically presented. Due to the unique structure of nanotubers (nanofibers), they can modify the microstructure of pyrocarbon and induce the deposition of pyrocarbon with high text in carbon/carbon composites. So the carbon/carbon composites modified by CNT/CNF have more excellent properties.

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“…For the fabrication of a uniform array of devices, there are many solution process-based ex situ CNTs deposition techniques which mainly includes inkjet printing 15 , 16 , photolithographic patterning 17 , 18 , drop-casting 19 , dip-coating 20 , electrophoretic deposition 21 , spin-coating 22 , and spray-coating 3 , 23 . Low-cost inkjet printers have lower resolution, control of drop size and spacing between the line features; whereas commercial inkjet printers are expensive 24 .…”

Section: Introductionmentioning

confidence: 99%

Chemical-free and scalable process for the fabrication of a uniform array of liquid-gated CNTFET, evaluated by KCl electrolyte

Agarwal

Thakur

Sharma

et al. 2021

Sci Rep

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Biosensors based on liquid-gated carbon nanotubes field-effect transistors (LG-CNTFETs) have attracted considerable attention, as they offer high sensitivity and selectivity; quick response and label-free detection. However, their practical applications are limited due to the numerous fabrication challenges including resist-based lithography, in which after the lithography process, the resist leaves trace level contaminations over the CNTs that affect the performance of the fabricated biosensors. Here, we report the realization of LG-CNTFET devices using silicon shadow mask-based chemical-free lithography process on a 3-in. silicon wafer, yielding 21 sensor chips. Each sensor chip consists of 3 × 3 array of LG-CNTFET devices. Field emission scanning electron microscope (FESEM) and Raman mapping confirm the isolation of devices within the array chip having 9 individual devices. A reference electrode (Ag/AgCl) is used to demonstrate the uniformity of sensing performances among the fabricated LG-CNTFET devices in an array using different KCl molar solutions. The average threshold voltage (Vth) for all 9 devices varies from 0.46 to 0.19 V for 0.1 mM to 1 M KCl concentration range. This developed chemical-free process of LG-CNTFET array fabrication is simple, inexpensive, rapid having a commercial scope and thus opens a new realm of scalable realization of various biosensors.

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Photolithography-based carbon nanotubes patterning for field emission displays

Cited by 38 publications

References 10 publications

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

Progress in Studies on Carbon and Silicon Carbide Nanocomposite Materials

Chemical-free and scalable process for the fabrication of a uniform array of liquid-gated CNTFET, evaluated by KCl electrolyte

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Photolithography-based carbon nanotubes patterning for field emission displays

Cited by 38 publications

References 10 publications

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH2O2Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH2O2Decomposition

Progress in Studies on Carbon and Silicon Carbide Nanocomposite Materials

Chemical-free and scalable process for the fabrication of a uniform array of liquid-gated CNTFET, evaluated by KCl electrolyte

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Product

Resources

About

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition

High Aspect Ratio Carbon Nanotube Membranes Decorated with Pt Nanoparticle Urchins for Micro Underwater Vehicle PropulsionviaH₂O₂Decomposition